Oblique Incidence Deposition for Antiferromagnetic Pinning Layer

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Solution Overview

Problem

Multilayer magnetoelectronic devices face challenges in maintaining stability and robustness under high temperatures and external magnetic fields, with conventional devices having limited usable regimes and low absolute magnetic field values due to inadequate pinning effects in ferromagnetic layers.

Innovation Solution

A method involving the deposition of a multilayer structure with an antiferromagnetic pinning layer and ferromagnetic layers using oblique incidence deposition, where the first ferromagnetic layer is pinned by the antiferromagnetic layer, enhancing unidirectional anisotropy and exchange bias, resulting in a stronger pinning effect and a more square-like hysteresis curve with an extended usable regime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional deposition methods are used to deposit antiferromagnetic pinning layers, then the manufacturing process is simple, but the pinning effect is insufficient resulting in low absolute magnetic field values and limited usable regimes

Engineering Contradiction:
Improvepinning effect strengthVSAvoiddeposition process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent changes the deposition parameters by using oblique incidence deposition at specific angles (45-60 degrees from normal) to the substrate surface. This parameter change in the deposition geometry creates a more effective pinning interface between the antiferromagnetic and ferromagnetic layers, significantly enhancing the exchange bias effect and extending the usable magnetic field regime from conventional limits to over 100 mT.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces a geometric dimension to the deposition process by depositing layers at an oblique angle rather than perpendicular to the substrate. This dimensional change in the deposition approach modifies the microstructure and interfacial properties of the pinning layer, creating enhanced magnetic coupling without adding additional material layers.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Stability of the object's composition

If the ferromagnetic layer is pinned to the antiferromagnetic layer to achieve stability under external magnetic fields, then the magnetic orientation stability improves, but the hysteresis curve becomes distorted with reduced usable regime

Engineering Contradiction:
Improvemagnetic orientation stabilityVSAvoidhysteresis curve quality
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The patent optimizes deposition parameters including oblique incidence angle (45-60 degrees), deposition rate, and layer thickness ratios to achieve a balance between pinning strength and hysteresis quality. By carefully controlling these parameters, the method produces a square-like hysteresis curve with sharp switching characteristics while maintaining stability under external fields.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite multilayer structures combining antiferromagnetic materials (such as IrMn, PtMn) with ferromagnetic materials (such as CoFeB, CoFe) in specific configurations. The composite nature of these layered structures enables simultaneous achievement of strong pinning effects and well-defined hysteresis characteristics through interfacial exchange coupling.

Inventive Principle:
Principle #40Composite materials

3Reliability

If the multilayer device is designed for high temperature stability, then the robustness under adverse conditions improves, but the manufacturing complexity increases

Engineering Contradiction:
Improvehigh temperature stabilityVSAvoidmultilayer structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent uses composite multilayer structures with specific material combinations (antiferromagnetic layers like IrMn, PtMn, CoFeB with ferromagnetic layers) that inherently provide high temperature stability through strong interfacial exchange coupling. The composite structure achieves thermal robustness without requiring additional protective layers or complex thermal management systems.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent enhances local quality at the critical antiferromagnetic-ferromagnetic interface through oblique incidence deposition, creating a modified microstructure and enhanced exchange coupling precisely where needed. This localized enhancement provides high temperature stability without requiring modification of the entire device structure.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method produces a multilayer device with a significantly increased absolute magnetic field value and an extended usable regime, ensuring stable behavior under various environmental conditions, including high temperatures and external magnetic fields.

Implementation Method 1

The antiferromagnetic layer, whose net magnetization is zero, induces an exchange bias in the ferromagnetic layer. The exchange bias results in a preferred unidirectional anisotropy in the magnetization of the adjacent pinned ferromagnetic layer.

Methodology Applied
Scientific EffectExchange bias: Magnetism

Implementation Method 2

A method involving the deposition of a multilayer structure with an antiferromagnetic pinning layer and ferromagnetic layers using oblique incidence deposition

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Implementation Method 3

In the case of multilayer magnetoelectronic devices, such multilayer devices often make use of magnetoresistance, which is the effect that the electrical resistance of a magnetic multilayer system is dependent on the relative orientation of two adjacent magnetic layers

Methodology Applied
Scientific EffectMagnetoresistance: Magnetoresistance

Data Source

PatentUS10998131B2Multilayer device having an improved antiferromagnetic pinning layer and a corresponding manufacturing method
Publication Date: 2021.05.04 DEUTES ELEKTRONEN SYNCHROTRON DESY
  • US10998131B2 patent drawing
  • US10998131B2 patent drawing
  • US10998131B2 patent drawing

AI summary

A method of producing a multilayer device, such as a multilayer magnetoelectronic device, and a device with an improved magnetic pinning. The device includes a multilayer structure including an antiferromagnetic pinning layer and one or more ferromagnetic layers. Each of the ferromagnetic layers has a boundary surface with the antiferromagnetic layer. The antiferromagnetic layer is deposited at a nonzero angle of incidence with respect to a direction perpendicular to the plane of extension of the antiferromagnetic pinning layer. This oblique incidence deposition gives rise to a surface roughness of the antiferromagnetic pinning layer which is described by a plane wave function.