Oblique-Angle Particle Removal Tool for CMOS Sensor Cleaning
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Solution Overview
Problem
Existing methods for removing foreign particles from CMOS sensor surfaces are inefficient, as they often damage the fragile surfaces and result in short tool lifespan due to limited use of the cleaning area, leading to resource wastage and contamination risks.
Innovation Solution
An automated method and apparatus that uses a tool gripper to orient a particle removal tool at an oblique angle, allowing the flank region to contact and attract foreign particles, maximizing the tool's surface area usage and preventing damage, with a sticky tip portion and alignment actuator to control force and position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a vertically arranged particle removal tool is used to lift foreign particles from the surface, then the fragile surface is prevented from being damaged, but only the apex region of the tool is utilized resulting in short tool lifespan and resource wastage
Solution Approach 1:
The invention changes the tool orientation from vertical to oblique angle (e.g., 45 degrees), transitioning from one-dimensional apex contact to two-dimensional flank region contact. This dimensional change allows the entire flank surface to engage with particles, increasing tool utilization from a point contact to a surface contact, thereby extending tool lifespan while maintaining surface protection
2Reliability
If the same cleaning area of the particle removal tool is used repeatedly, then cleaning action is consistent, but the risk of contamination of the surface by foreign particles increases
Solution Approach 1:
The invention segments the tool's cleaning function across the entire flank region rather than concentrating it at the apex. By orienting the tool at an oblique angle, different portions of the flank surface can be used sequentially or simultaneously, distributing the cleaning load and reducing the probability that used cleaning areas will contact and transfer particles back to the surface
3Productivity
If manual removal of particles is performed by human operators using tools, then particle removal can be performed, but the CMOS sensor may be damaged during the removal process
Solution Approach 1:
The invention enables the particle removal tool to perform its function through automated oblique-angle engagement, where the tool's geometry and orientation automatically provide the necessary lifting force at a safe angle. This eliminates the need for manual operation while maintaining the protective oblique engagement, allowing consistent, damage-free particle removal through automated control
4Force
If a vertically arranged particle removal tool is used, then particle lifting force is maximized, but the effective cleaning area is limited to the apex resulting in limited cleaning efficiency
Solution Approach 1:
The invention applies oblique-angle orientation to transform the cleaning interaction from point-contact apex engagement to surface-contact flank engagement. This dimensional transition maintains the necessary lifting force component while dramatically increasing the effective cleaning area from a point to an extended surface, thereby improving cleaning efficiency without sacrificing particle removal capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach extends the lifespan and usage of each particle removal tool, reduces contamination risks, and enhances cleaning efficiency, leading to cost savings and improved product yield by utilizing a larger surface area of the tool before replacement.
Implementation Method 1
a tip of the particle removal tool including a sticky tip portion, the sticky tip portion further having an apex region at a remote end of the sticky tip portion and a flank region adjoining the apex region
Data Source
AI summary
A foreign particle removal system for removing a foreign particle from a surface of an object has a tool gripper which grips a particle removal tool. A tip of the particle removal tool has a sticky tip portion. The sticky tip portion has an apex region at a remote end of the sticky tip portion and a flank region adjoining the apex region. The tool gripper holds the particle removal tool at an oblique angle with respect to the surface so that the flank region of the sticky tip portion faces towards the surface. The tilted particle removal tool is conveyed with the tool gripper to contact the foreign particle on the surface with the flank region of the sticky tip portion and a force is exerted onto the surface to attract the foreign particle onto the flank region. The particle removal tool may then be lifted away from the surface together with the foreign particle.