Oblique-Facet Shaft Seat for Backlash-Free Spider Alignment

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Solution Overview

Problem

Mechanical systems experience backlash and clearance issues due to gaps between elements, leading to oversizing and slowing down of mechanical components, which affects performance.

Innovation Solution

A shaft member with a seat end featuring oblique and wedge facets, coupled with a spider member, to precisely locate and fix the spider member on the shaft, minimizing backlash and improving alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If gaps are left between mechanical elements, then ease of assembly and manufacturing is improved, but backlash and clearance increase leading to reduced precision

Engineering Contradiction:

Improveease of assemblyVSAvoidmechanical precision

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The invention transitions from traditional radial clearance compensation to axial dimension control. The oblique facets are positioned at the axial ends of the shaft member, and the spider member's arms engage these facets axially, allowing precise positioning in the axial dimension while maintaining rotational freedom. This dimensional shift enables gap elimination without compromising assembly ease.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The shaft member features non-uniform geometry with oblique facets concentrated at the axial ends rather than uniform radial clearance throughout. This local concentration of positioning features at specific axial locations provides precise backlash elimination where needed while maintaining overall structural integrity and ease of manufacturing.

Inventive Principle:

Principle #3Local quality

2Reliability

If mechanical components are oversized to accommodate backlash, then reliability is improved, but device complexity and space requirements increase

Engineering Contradiction:

ImprovereliabilityVSAvoidcomponent size

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The oblique facets create a dynamic engagement mechanism where the spider member's arms can slide along the facets during assembly and operation. This dynamic interaction automatically compensates for backlash through controlled movement rather than requiring oversized static components, maintaining reliability with compact dimensions.

Inventive Principle:

Principle #15Dynamics

3Manufacturing precision

If mechanical systems operate at reduced speeds to accommodate clearance, then manufacturing precision is improved, but productivity decreases

Engineering Contradiction:

Improvealignment precisionVSAvoidmotion speed

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The oblique facets are pre-positioned at axial angles during manufacturing, creating built-in alignment features that guide the spider member into precise positioning before operation begins. This preliminary geometric configuration eliminates the need for slow operational adjustments, enabling high-speed operation with maintained precision.

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS20250308979A1Shaft members, shaft arrangements and semiconductor processing systems including shaft members, and related methods of making shaft members for shaft arrangements

Publication Date: 2025.10.02 ASM IP HLDG BV

AI summary

A shaft member includes a shaft member body arranged along an axis having a drive end, an intermediate segment, and a seat end. The drive end defines a fixation feature therein, the intermediate segment extends from the drive end of the shaft member body, and the seat end is axially separated from the drive end of the shaft member body by the intermediate segment of the shaft member body. The seat end has one or more oblique facet to axially locate a spider member on the shaft member body. Shaft arrangements, semiconductor processing systems, and methods of making shaft members are also described.