Observation Position Display for Magnification-Linked Image Navigation
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Solution Overview
Problem
Existing observation assistance devices for charged particle beam devices struggle to maintain visibility of observation positions when magnification differences between the observation position display unit and the image being displayed are significant, leading to difficulty in specifying the observation position.
Innovation Solution
An observation assistance device that includes an observation position display unit, a display processing unit, and a representative image selection processing unit, which controls the display of representative images to maintain visibility and align them with changing magnifications, using a charged particle beam device to capture and process sample images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple observation position display images with different magnifications are displayed in an overlapping manner, then the observation position can be presented even when magnification differs significantly, but it becomes easy to lose sight of the image being displayed and difficult to specify the observation position
Solution Approach 1:
The display is segmented into multiple functional regions: a main image display area showing the current observation image, and a separate observation position display area showing thumbnail images. This spatial segmentation allows each region to serve its specific function without interfering with the other, resolving the contradiction between magnification adaptability and observation position specification.
Solution Approach 2:
A cursor is introduced as an intermediary element that connects the main image display and the observation position display. The cursor position in the main image corresponds to the selected thumbnail, and vice versa. This intermediary enables easy switching between different magnifications while maintaining clear visibility of both the overall image and the observation position.
2Adaptability or versatility
If the magnification of the observation position display unit is significantly different from the magnification of the image being displayed, then comprehensive observation information can be provided, but it becomes difficult to maintain visibility of the observation position
Solution Approach 1:
The solution transitions from a single-dimensional display (overlapping images at different magnifications on the same plane) to a two-dimensional layout (separate main display area and thumbnail area). This dimensional change allows the system to maintain both high magnification detail and low magnification overview simultaneously without compromising visibility of either.
Data Source
AI summary
An observation assistance device for a sample includes an observation position display unit that displays, in correspondence with an image display section, positions of a plurality of captured images of the sample which are captured by a charged particle beam device, a display processing unit that controls the observation position display unit, and a representative image selection processing unit that selects a representative image on the basis of the plurality of captured images, in which the display processing unit controls the representative image to a size that is easy to view and displays the representative image on the observation position display unit in response to a change in a magnification of the image display section.