Observation Unit Gold-Coated Silica Glass High-Temperature Monitoring
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional observation units for high-temperature semiconductor manufacturing environments suffer from overexposure due to intense light from the heating source, leading to reduced image quality and difficulty in monitoring substrate deformation and chamber conditions during epitaxial crystal growth.
Innovation Solution
An observation unit featuring a silica glass plate with gold films on both sides to reduce light transmission in the visible and infrared regions, combined with a cooling medium supply system to efficiently cool imaging components and prevent overheating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a conventional observation unit is used to observe the inside of a reaction chamber at high temperature, then the imaging components can capture images, but the intense light from the heating source causes overexposure and reduced image quality
Solution Approach 1:
A silica glass plate with gold films is introduced as an intermediary component between the reaction chamber and the imaging components. This plate selectively transmits visible light while reflecting infrared light, thereby reducing overexposure from the intense heating source light without completely blocking the view into the chamber, thus maintaining image quality
Solution Approach 2:
The optical properties of the light transmission path are modified by coating the silica glass plate with gold films. This changes the transmission characteristics of the plate, reducing the intensity of transmitted light in specific wavelength ranges (infrared) while maintaining visibility in other ranges (visible), thereby resolving the overexposure issue
2Measurement precision
If the imaging components are placed close to the reaction chamber for clear observation, then image resolution improves, but the high temperature causes overheating and damage to the imaging components
Solution Approach 1:
The observation system is divided into separate functional zones: a hot zone containing the reaction chamber and a cool zone containing the imaging components. The silica glass plate with gold films acts as a thermal and optical interface between these zones, allowing optical transmission while blocking heat transmission, thus enabling close observation without thermal damage
Solution Approach 2:
The silica glass plate with gold films serves as a thermal barrier intermediary between the high-temperature reaction chamber and the imaging components. It allows visible light transmission for observation while reflecting infrared radiation, thereby protecting the imaging components from overheating while maintaining observation accuracy
3Reliability
If cooling is applied to the imaging components to prevent overheating, then component reliability improves, but condensation may occur on the cooling surfaces
Solution Approach 1:
The cooling method is changed from direct contact cooling to indirect cooling via a cooling medium flowing through channels in the housing case. This maintains the temperature of the imaging components below the dew point to prevent condensation while still providing sufficient cooling to prevent overheating, thus maintaining component reliability without introducing condensation issues
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces overexposure and maintains image quality, allowing for accurate monitoring of substrate deformation and chamber conditions during high-temperature processes, ensuring reliable observation of semiconductor manufacturing processes.
Implementation Method 1
a silica glass plate having a gold film on both sides or one side
Implementation Method 2
the translucent member is a silica glass plate having a gold film on both sides or one side
Implementation Method 3
cooling medium supplying means for supplying a cooling medium to the inside of the housing case
Data Source
AI summary
It is an object of the present invention to provide an observation unit which efficiently cools apparatus members in a reaction chamber of a semiconductor manufacturing apparatus in a high-temperature atmosphere and reduces overexposure. An observation unit comprising: an imaging apparatus for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature; a housing case which houses the imaging apparatus and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging apparatus; and a cooling medium supplying apparatus for supplying a cooling medium to the inside of the housing case, wherein the translucent member is a silica glass plate having a gold film on both sides or one side.