OES Detector Gain Adjustment for Out-of-Range Spectral Lines

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Optical emission spectroscopy (OES) detectors face challenges in detecting spectra lines with intensities that are too large or too small to be within the detection range, leading to reduced sensitivity and signal-to-noise ratio (SNR).

Innovation Solution

A method and apparatus for OES detector signal sensitivity improvement involve scanning OES spectra, defining wavelengths with intensities outside a predetermined range, and adjusting their intensities using predetermined factors to calculate amplification/attenuation coefficients, selectively amplifying or suppressing individual spectra lines to meet detection requirements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the intensity of spectra lines is increased to improve detection of weak signals, then the signal-to-noise ratio improves, but the intensities become too large to be within the detection range

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoiddetection range compliance
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent applies local quality by adjusting the gain of individual pixels or wavelength regions independently rather than uniformly across the entire spectrum. The controller identifies specific pixels with intensities below a threshold and applies gain adjustment only to those regions, allowing weak signals to be amplified while keeping strong signals within the detection range.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements dynamics by making the gain adjustment adaptive and variable based on the actual measured intensity of each pixel. The system dynamically determines the required gain factor for each pixel based on its intensity relative to a threshold, and this gain factor is then applied in subsequent measurements. This dynamic adjustment allows the system to optimize detection for each specific measurement condition.

Inventive Principle:
Principle #15Dynamics

2Reliability

If the intensity of spectra lines is decreased to bring strong signals within detection range, then the detection range compliance improves, but the sensitivity to weak signals deteriorates

Engineering Contradiction:
Improvedetection range complianceVSAvoidsignal-to-noise ratio
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent applies local quality by selectively adjusting gain only for specific pixels or wavelength regions that require it, rather than applying a uniform attenuation across the entire spectrum. This localized approach ensures that strong signals are brought within range while weak signals in other regions maintain their intensity and detectability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The system dynamically determines whether gain adjustment is needed for each pixel based on intensity thresholds, and applies different gain factors to different regions. This dynamic, selective adjustment allows the system to maintain detection range compliance for strong signals while preserving sensitivity for weak signals.

Inventive Principle:
Principle #15Dynamics

3Measurement precision

If uniform gain adjustment is applied to all wavelengths to improve weak signal detection, then the signal-to-noise ratio improves, but the complexity of intensity correction increases

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidintensity correction process
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the spectrum into individual pixels or wavelength regions and processes each segment independently based on its specific intensity characteristics. Rather than applying a single uniform correction to the entire spectrum, the system identifies and processes only those pixels that require correction, simplifying the overall correction process while maintaining effectiveness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system uses dynamic threshold-based identification to determine which pixels require correction, and applies gain adjustment only to those specific pixels. This dynamic, selective approach reduces the complexity of intensity correction compared to uniform adjustment of all wavelengths, as it focuses computational resources only on the pixels that need correction.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS20250283814A1Method for optical emission spectroscopy (OES) detector signal sensitivity improvement
Publication Date: 2025.09.11 TOKYO ELECTRON LTD
  • US20250283814A1 patent drawing
  • US20250283814A1 patent drawing
  • US20250283814A1 patent drawing

AI summary

Aspects of the present disclosure provide a method for optical emission spectroscopy (OES) detector signal sensitivity improvement. For example, the method can include scanning OES spectra of an optical emission, and defining all wavelengths of the optical emission whose intensities do not satisfy a predetermined requirement. The method can further include adjusting the intensity of each of the defined wavelengths by a first predetermined factor, and calculating an amplification/attenuation coefficient corresponding to the intensity of the defined wavelength based on the first predetermined factor. The method can further include conducting data analysis on the optical emission by taking into account all the amplification/attenuation coefficients.