Off-line Vacuum Suction Substrate Transport Apparatus
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Solution Overview
Problem
Conventional substrate transportation during liquid crystal display manufacturing is prone to substrate swaying and falling due to inadequate fixation by clamping mechanisms, which can lead to instability and movement issues during sputtering processes.
Innovation Solution
An apparatus utilizing an off-line vacuum suction system with a carrying frame, vacuum suction device, and detaching device that clamps and then uses vacuum suction to firmly hold the substrate, allowing for continuous suction and detachment from the vacuum pipeline, preventing movement interference and ensuring stable transport.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a clamping mechanism is used to fix the substrate, then the substrate can be held in position, but the substrate may sway and fall due to gaps between the substrate and clamper
Solution Approach 1:
The patent replaces the mechanical clamping system with a vacuum suction system. The vacuum suction device creates a vacuum field that uniformly holds the substrate across its entire surface, eliminating the gap issues inherent in point-contact mechanical clamping. This substitution of mechanical contact with a field-based vacuum force resolves the substrate swaying problem while maintaining reliable fixation.
Solution Approach 2:
The patent employs vacuum suction technology, which is a pneumatic principle, to hold the substrate. The vacuum suction device creates a pressure difference between the atmosphere and the vacuum chamber, generating a holding force that distributes uniformly across the substrate surface. This pneumatic approach eliminates the gaps and unstable contact points of mechanical clamping, preventing substrate swaying and falling.
2Reliability
If the vacuum suction device remains connected to the vacuum pipeline, then vacuum suction can be maintained, but the pipeline length limits the transport distance
Solution Approach 1:
The patent extracts the vacuum suction capability from the fixed vacuum pipeline system and integrates it into a mobile vacuum suction device that travels with the substrate. This allows the substrate to be transported beyond the reach of fixed pipelines while maintaining continuous vacuum suction through the self-contained mobile device, effectively removing the pipeline length constraint on transport distance.
Solution Approach 2:
The patent transforms the static vacuum pipeline system into a dynamic mobile vacuum suction device that moves together with the substrate during transport. This dynamic configuration allows the vacuum suction point to remain continuously connected to the substrate regardless of transport distance, eliminating the limitation imposed by fixed pipeline length while maintaining reliable vacuum holding.
3Stability of the object's composition
If the clamping mechanism is used to keep the substrate straight, then the substrate orientation can be maintained, but the substrate may still move due to insufficient fixation
Solution Approach 1:
The patent replaces the mechanical clamping system with a vacuum suction system that provides distributed holding force across the entire substrate surface. This uniform vacuum field not only maintains substrate orientation but also prevents any movement or swaying that could occur with point-contact mechanical clamping, simultaneously achieving both orientation stability and fixation reliability.
Solution Approach 2:
The patent applies vacuum suction uniformly across the entire substrate surface, creating a homogeneous holding force distribution. This uniform force field ensures that the substrate is held firmly at all points simultaneously, maintaining both correct orientation and preventing any localized movement or swaying that could occur with non-uniform mechanical clamping.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides stable and secure transport of substrates by maintaining continuous vacuum suction, preventing swaying and falling, and avoiding pipeline length limitations, thus enhancing the reliability of substrate handling during manufacturing processes.
Implementation Method 1
the vacuum suction device is arranged to suck and fix the substrate
Data Source
AI summary
Embodiments of the present application provide an apparatus for carrying a substrate by an off-line vacuum suction and a method for transporting a substrate. The apparatus includes a carrying frame provided with a clamper, a vacuum suction device and a detaching device arranged on the carrying frame, wherein the vacuum suction device is arranged to suck and fix a substrate and is connectable to and detachable from a vacuum pipeline and the detaching device is arranged to detach the vacuum suction device and the vacuum pipeline from each other while keeping the vacuum suction device to continuously suck the substrate to be transported. The apparatus and the method can improve fixing of the substrate and achieve off-line suction to the substrate.