OHT Auto-Routing Between Semiconductor Line Facilities
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Solution Overview
Problem
In large-scale FAB manufacturing, operating multiple OHT control systems separately and ensuring seamless logistics processing in semiconductor lines is challenging due to the need for automated switching of network settings and maps, as well as non-stop transfer and transport between facilities, which current technologies do not efficiently address.
Innovation Solution
A semiconductor line logistics processing system that includes a first and second line facility with control modules, an OHT unit operating via auto-routing under a main control unit, with intermediate facilities for OHT passage, and communication modules for ensuring normal operating states, allowing for efficient logistics transfer and real-time relocation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If multiple OHT control systems are operated separately in large-scale FAB, then each control system can be managed independently, but logistics processing between different facilities cannot be performed non-stop and requires manual switching of setting values
Solution Approach 1:
The patent merges multiple separate OHT control systems into a unified control architecture where a first OHT control system and a second OHT control system can cooperate seamlessly. The interlocking mechanism allows these previously separate systems to function as an integrated whole, enabling non-stop logistics processing between different facilities while maintaining the benefit of independent system management through modular design.
Solution Approach 2:
The OHT control system is designed with multi-functionality to handle both intra-facility logistics (within the same facility) and inter-facility logistics (between different facilities). The system can automatically switch between different operational modes and routing configurations, eliminating the need for manual switching of setting values and maps while maintaining versatility across different operational scenarios.
2Productivity
If automated routing is applied for OHT transfer between facilities, then non-stop logistics processing is enabled, but automated switching of network settings and maps is required which increases system complexity
Solution Approach 1:
The system performs preliminary actions by pre-configuring routing information, network settings, and map data in advance. When an OHT unit needs to transfer between facilities, the control system automatically retrieves and applies the pre-prepared routing configurations without requiring real-time manual intervention. This reduces the perceived complexity during operation while enabling seamless automated transfers.
Solution Approach 2:
The patent introduces an intermediary control mechanism that manages the automated switching between different facility configurations. This intermediary layer handles the complex tasks of network setting switching, map loading, and routing calculation, shielding the operational complexity from the user while enabling non-stop logistics processing between facilities.
3Loss of time
If OHT units perform direct transfer between first line facility and second line facility, then input/output time is reduced, but automated routing control is required which increases automation requirements
Solution Approach 1:
The OHT control system is designed to be self-service capable, automatically determining optimal routing paths and configuring necessary settings without requiring external manual intervention. The system autonomously manages the increased automation requirements by implementing self-diagnosis, self-routing, and selfconfiguration capabilities, thereby reducing OHT input/output time while handling the automation burden internally.
Data Source
AI summary
A semiconductor line logistics processing system and method are provided. A semiconductor line logistics processing method includes selecting a first line facility including a first control module for logistics transfer within a semiconductor line; interlocking a second line facility including a second control module for the logistics transfer with the first line facility; and performing the logistics transfer by the OHT unit between the first line facility and the second line facility, wherein the OHT unit is operated in an auto routing method under the control of the main control unit for logistics transfer in a direct method between the first line facility and the second line facility.