Oil Diffusion Pump with Induction-Heated Tubular Vapor Generator

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Solution Overview

Problem

Oil diffusion pumps using heater wires as a heating source face issues such as disconnection, insulation defects, high temperature contact failures, inefficient energy use, slow heat response, and limited installation flexibility, leading to wasteful power consumption and prolonged start-up times.

Innovation Solution

An oil diffusion pump employing an oil vapor generator with a tubular heating member heated by a low-frequency alternating current induction coil, where the magnetic flux generates an eddy current and Joule heat, eliminating the need for direct heating of the coil and allowing local heating of the operating oil.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a heater wire is used as a heating source for operating oil, then the device can be formed inexpensively, but it causes heating element failure due to disconnection, insulation defects, and high temperature contact failures

Engineering Contradiction:
Improvedevice costVSAvoidheating function stability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent extracts the heater wire from the system and replaces it with an induction heating coil that heats a tubular member indirectly. This eliminates the direct contact and high-temperature stress on heating elements, preventing disconnection and insulation defects while maintaining manufacturing simplicity.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a tubular member as an intermediary between the induction coil and the operating oil. The coil generates magnetic flux that induces eddy currents in the tubular member, which then heats the oil. This mediator prevents direct high-temperature contact failures and improves reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If a heater wire is used as a heating source, then the device structure is simple, but the installation position selection is limited due to red-hot high temperature

Engineering Contradiction:
Improveheating structureVSAvoidinstallation position flexibility
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The tubular member acts as a heat transfer intermediary that allows the induction coil to be positioned away from direct contact with the oil. The coil can be installed in various positions around the tubular member, providing flexibility in installation while maintaining effective heating through the tubular wall.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The heating mechanism transitions from direct linear contact (heater wire) to three-dimensional magnetic field interaction (induction coil around tubular member). This allows the heating element to be positioned in multiple spatial configurations, enhancing installation flexibility.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Device complexity

If a heater wire is used as a heating source, then the structure is simple, but energy efficiency is poor with large heat conduction loss

Engineering Contradiction:
Improveheating structureVSAvoidheat conduction loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The patent replaces the thermal conduction-based heater wire system with an electromagnetic induction-based heating system. The induction coil generates magnetic flux that directly induces eddy currents in the tubular member, converting electromagnetic energy to thermal energy more efficiently and reducing heat conduction losses.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The heating mechanism changes from resistive heating at low temperature to induction heating with rapid high-temperature generation. This parameter change enables faster heat generation with reduced energy loss and improved thermal efficiency.

Inventive Principle:
Principle #35Parameter changes

4Device complexity

If a heater wire is used as a heating source, then the structure is simple, but heat response is slow with prolonged start-up time

Engineering Contradiction:
Improveheating structureVSAvoidstart-up time
Core Design Contradiction:
Device complexityVSLoss of time

Solution Approach 1:

The patent replaces the slow thermal conduction heating of the heater wire with rapid electromagnetic induction heating. The induction coil generates magnetic flux that immediately induces eddy currents in the tubular member upon power application, enabling fast heat response and reduced start-up time.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The heating system transitions from low-temperature resistive heating to high-temperature induction heating with rapid energy conversion. This parameter change enables the system to reach operating temperature much faster, reducing start-up time significantly.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces the risk of heating element failure, enhances energy efficiency, shortens start-up time, and improves heat response, while allowing greater flexibility in coil placement and reducing energy consumption.

Implementation Method 1

a low frequency alternating current is applied to the coil to generate a magnetic flux interlinking with the vertical upright direction of the tubular member, the generated magnetic flux generates an induced current, that is, an eddy current inside the tubular member and Joule heat is produced thereby

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

Joule heat is produced thereby (low frequency induced heating). The generated heat heats the tubular member itself (self-heating of the tubular member)

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 3

The generated heat heats the tubular member itself (self-heating of the tubular member), consequently, the operating oil is heated

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 4

the heat vaporizes the operating oil

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentEP2975271B1Oil diffusion pump and vacuum film formation device
Publication Date: 2019.08.07 SHINCRON KK
  • EP2975271B1 patent drawingFigure 1~2
  • EP2975271B1 patent drawingFigure 3~4
  • EP2975271B1 patent drawingFigure 5~6

AI summary

Provided is an oil diffusion pump equipped with an oil vapor generator capable of eliminating the problems occurring when a heater wire is used as a heating source for an operating oil. The present invention is a vacuum pump for which an oil vapor generator (70) is arranged within a casing (51) and this oil vapor generator is operated to vaporize an operating oil (8), thereby producing oil vapor and this oil vapor is sprayed from a jet (53, 53a) to exhaust intake air. The oil vapor generator (70) is equipped with: a container (71, 72) in the interior of which oil is stored, with the lower end of the tubular member (71), which comprises a material to be heated, being closed; and induction coil (75) wrapped around the atmosphere-side perimeter of the tubular member (71) (in particular, the case inner wall (71b)) with an insulating material (73) therebetween; and a power supply means that applies a low-frequency alternating current of several tens of Hz to several hundreds of Hz to the induction coil (75). The configuration is such that the tubular member (71) itself is heated when the power supply means is operated and the low-frequency alternating current is applied to the induction coil (75), thereby vaporizing the oil within the container.