OLED Display Panel Bending Region Interlayer Dielectric Layer
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Solution Overview
Problem
Conventional technologies suffer from losses in the organic photoresist layer during the dry etching process for source-and-drain electrode traces in OLED display devices, leading to broken electrode traces.
Innovation Solution
A display panel design that includes a bending-region interlayer dielectric layer disposed between the source-and-drain electrode metal layer and the organic photoresist layer, with specific thickness and material properties to reduce photoresist layer loss and prevent electrode trace breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a dry etching process is used for source-and-drain electrode traces, then the etching efficiency is improved, but the organic photoresist layer suffers losses causing electrode traces to break
Solution Approach 1:
An aluminum erosion resistance layer is introduced as an intermediary between the organic photoresist layer and the source-and-drain electrode traces. This intermediate layer prevents direct contact between the aluminum-based electrode material and the photoresist, thereby stopping the erosion process while allowing the dry etching to proceed efficiently.
Solution Approach 2:
The aluminum erosion resistance layer is deposited beforehand on the organic photoresist layer to provide protective cushioning against the harmful effects of aluminum erosion during the subsequent dry etching process. This preventive measure ensures the photoresist layer remains intact throughout the etching operation.
2Manufacturing precision
If the organic photoresist layer is made thinner to improve resolution, then the manufacturing precision is improved, but the layer becomes more susceptible to erosion and breakage
Solution Approach 1:
The aluminum erosion resistance layer serves as a mediator that protects the thin organic photoresist layer from erosion during dry etching. This allows the photoresist to be made thinner for better resolution without sacrificing its durability, as the resistance layer absorbs the erosive impact.
3Quantity of substance
If aluminum-based material is used for source-and-drain electrode traces, then the electrical conductivity is improved, but the organic photoresist layer below the traces suffers erosion
Solution Approach 1:
The aluminum erosion resistance layer acts as an intermediary barrier between the aluminum-based electrode material and the organic photoresist layer. This intermediate layer allows the use of highly conductive aluminum material while preventing it from directly eroding the photoresist during the dry etching process.
Solution Approach 2:
The potential harmful effect of aluminum erosion is converted into a beneficial process by using the erosion resistance layer to control and direct the etching. The aluminum material's reactivity, which would normally cause damage, is harnessed to etch the resistance layer selectively, which in turn protects the underlying photoresist.
Data Source
AI summary
A display panel and a preparation method thereof, and a display device are disclosed. The display panel includes a display region and a bending region located outside the display region. The display panel includes a source-and-drain electrode metal layer. The display panel includes an organic photoresist layer in the bending region. A bending-region interlayer dielectric layer is disposed at one side of the organic photoresist layer near the source-and-drain electrode metal layer. Source-and-drain electrode traces can be prevented from breaking.