OLED Panel Bonding Metal Structure for Etching Corrosion Resistance
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Solution Overview
Problem
In OLED display manufacturing, the bonding metal is prone to corrosion during the etching process and is unstable in the environment, affecting product yield.
Innovation Solution
The use of a molybdenum titanium alloy or aluminum titanium alloy as both the light-shielding metal and bonding metal, with a spacer layer exposing the bonding metal surface to improve stability and corrosion resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If Cu is used as bonding metal to reduce trace impedance, then electrical conductivity is improved, but corrosion resistance deteriorates due to oxidation and etching solution attack
Solution Approach 1:
The patent introduces an ITO layer as an intermediary protective barrier between the Cu bonding metal and the etching solution. This intermediate layer prevents direct contact between the corrosive etching solution and the Cu metal, thereby protecting the bonding metal from corrosion while maintaining electrical conductivity.
Solution Approach 2:
The patent employs a composite structure combining Cu and ITO materials. The Cu layer provides excellent electrical conductivity for trace impedance reduction, while the ITO layer provides corrosion resistance. This composite material approach allows simultaneous achievement of both electrical performance and chemical stability.
2Stability of the object's composition
If ITO layer is added to protect Cu from oxidation, then oxidation resistance is improved, but corrosion resistance to etching solution deteriorates because Cu is still exposed through etching process
Solution Approach 1:
The ITO layer serves as a protective intermediary that prevents direct oxidation of Cu. By positioning ITO between the Cu metal and the external environment (including etching solution), it acts as a stable barrier that maintains the integrity of the bonding metal throughout the manufacturing process.
Solution Approach 2:
The ITO layer creates an inert protective environment around the Cu bonding metal, preventing reactive interactions with oxidizing agents and etching solutions. This passive protective layer effectively isolates the reactive Cu metal from harmful chemical environments.
Data Source
AI summary
The present invention provides an OLED display panel and a manufacturing method thereof. The OLED display panel comprises a display area and a bonding area defined at least at one side of the display area. The OLED display panel further comprises a substrate and a first metal layer disposed on the substrate. The first metal layer comprises a light-shielding metal disposed corresponding to the display area and a bonding metal disposed corresponding to the bonding area.