OLED Deposition Angle Control via Rotating Shielding Plates
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Solution Overview
Problem
In the manufacturing of organic light emitting diode (OLED) displays, maintaining a consistent deposition angle during the vacuum deposition process is challenging, leading to non-uniform thin film formation and reduced luminance uniformity across pixels.
Innovation Solution
A deposition apparatus with angle control members, featuring a rotation axis and shielding plates, is used to control and compensate for changes in the deposition angle over time, ensuring uniform thin film deposition across the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If vacuum deposition method is used to deposit organic material, then thin film can be formed on substrate, but deposition angle changes with passage of time leading to non-uniform thin film
Solution Approach 1:
The shielding plate is made rotatable around a rotation axis, transforming it from a static component to a dynamic one. This rotation allows the shielding plate to periodically adjust its position and compensate for deposition angle changes that occur over time, thereby maintaining uniform thin film deposition throughout the deposition process
Solution Approach 2:
The shielding plate rotates periodically around the rotation axis during the deposition process. This periodic rotation creates time-varying shielding effects that compensate for the gradual changes in deposition angle, ensuring consistent film uniformity over the entire deposition duration
2Manufacturing precision
If deposition angle is not controlled, then manufacturing process is simple, but luminance uniformity across pixels is reduced
Solution Approach 1:
The shielding plate is divided into multiple segments or zones along its length, each capable of providing independent shielding control for different regions of the substrate. This segmentation allows precise control of deposition angle across different pixel regions, improving luminance uniformity while keeping the overall structure manageable
Solution Approach 2:
The shielding plate acts as an intermediary component between the deposition source and substrate. By introducing this intermediate element with rotational capability, the system achieves precise deposition angle control without requiring complex adjustments of the deposition source or substrate positions
3Manufacturing precision
If angle control member is stationary, then device structure is simple, but deposition angle changes with time leading to non-uniform film
Solution Approach 1:
The shielding plate is made rotatable around a rotation axis, transforming it from a static component to a dynamic one. This rotation allows the shielding plate to periodically adjust its position and compensate for deposition angle changes that occur over time, thereby maintaining uniform thin film deposition throughout the deposition process
Solution Approach 2:
The rotatable shielding plate serves multiple functions: it provides deposition angle control, compensates for time-dependent angle drift, and can be adjusted to optimize deposition for different process conditions. This multi-functionality achieves precise thickness uniformity without requiring multiple separate control mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for the uniform formation of thin films with desired thickness, enhances luminance uniformity across OLED pixels, and improves manufacturing yield by allowing continuous process operation without stopping for angle adjustments.
Implementation Method 1
an organic material is evaporated or sublimated by using a deposition source unit to deposit it on the substrate
Implementation Method 2
an organic material is evaporated or sublimated by using a deposition source unit to deposit it on the substrate
Implementation Method 3
an organic material or metal used as the electrode employs a vacuum deposition method for depositing a corresponding material in a vacuum atmosphere and forming a thin film on a flat plate
Data Source
AI summary
A deposition apparatus includes: a deposition source including a spray nozzle linearly arranged in a first direction and discharging a deposition material; and a pair of angle control members disposed at both sides of the deposition source and controlling a discharging direction angle of the deposition material. Each angle control member includes a rotation axis parallel to the first direction, and a plurality of shielding plates installed about the rotation axis and separated from each other by a predetermined interval around the rotation axis. Although the deposition angle is changed according to the increasing of the process time, the deposition angle is compensated to form a uniform thin film. Also, the organic thin film may be uniformly deposited through each pixel of an organic light emitting diode (OLED) display, thereby increasing luminance uniformity for each pixel.