OLED Deposition Apparatus Laser Mask Alignment
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Solution Overview
Problem
Conventional OLED display manufacturing processes face challenges in achieving precise deposition of materials due to limitations in pattern accuracy and efficiency, particularly in forming flexible and bent display units for mobile electronic devices.
Innovation Solution
A deposition apparatus utilizing a laser beam to guide and deposit materials onto a substrate with a mask, enhancing precision by aligning laser beams with the deposition pattern, and an optical assembly to adjust the laser beam path, ensuring accurate and efficient material placement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional vacuum deposition process is used with FMM, then deposition can be performed, but pattern accuracy and deposition precision are insufficient
Solution Approach 1:
The invention divides the deposition process into two distinct stages: a first deposition process without FMM to form a common electrode pattern, and a second deposition process with FMM to form pixel electrode patterns. This segmentation allows each process to be optimized independently, improving overall pattern accuracy while maintaining productivity.
Solution Approach 2:
The invention performs preliminary deposition of the common electrode pattern before introducing the FMM for subsequent pixel electrode deposition. This preliminary action establishes a foundation that simplifies the subsequent patterning process and improves overall manufacturing precision.
2Manufacturing precision
If FMM is used for deposition, then pattern formation is possible, but deposition time increases and efficiency decreases
Solution Approach 1:
By segmenting the deposition into two processes where FMM is used only for the second (pixel electrode) deposition, the total time FMM is required is reduced. This allows pattern accuracy to be maintained for critical areas while minimizing time loss.
Solution Approach 2:
The invention extracts the FMM requirement from the first deposition process, eliminating unnecessary FMM usage time while preserving pattern accuracy where it is most needed in the second process.
3Manufacturing precision
If single deposition process is used, then manufacturing is simpler, but pattern accuracy is insufficient for flexible displays
Solution Approach 1:
The deposition process is segmented into two distinct processes with different FMM usage requirements. This segmentation enables precise control over pattern formation for flexible displays while maintaining manageable process complexity through clear process differentiation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise and efficient deposition of materials on substrates, reducing errors in the deposition pattern and improving process efficiency, particularly suitable for manufacturing flexible OLED displays for mobile devices.
Implementation Method 1
The laser generator is configured to generate a laser beam. The optical assembly is configured to guide the laser beam between the mask and the substrate.
Implementation Method 2
depositing an organic material on the substrate by evaporating or sublimating the organic material using a deposition source
Implementation Method 3
depositing an organic material on the substrate by evaporating or sublimating the organic material using a deposition source
Implementation Method 4
The vacuum deposition process may be performed by locating a substrate upon which an organic thin film is to be formed in a vacuum chamber
Data Source
AI summary
A deposition apparatus includes a chamber, a stage, a mask, a chuck, a deposition source, a laser generator, and an optical assembly. The stage is supported in the chamber. The mask is disposed on the stage. The mask includes a deposition pattern. The chuck is configured to support a substrate in the chamber. The chuck is configured to position the substrate to overlap the deposition pattern. The deposition source is disposed in the chamber. The deposition source is configured to provide a deposition material toward the substrate. The laser generator is configured to generate a laser beam. The optical assembly is configured to guide the laser beam between the mask and the substrate.