OLED Deposition Nozzle Angles for Shadow Reduction

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Solution Overview

Problem

In OLED display manufacturing, achieving high efficiency light emission is challenging due to the shadow phenomenon caused by the deposition of additional layers between electrodes, which affects deposition uniformity and efficiency.

Innovation Solution

A deposition apparatus with spray nozzles arranged to control the incident angle of the deposition material, including first spray nozzles parallel to the substrate and second spray nozzles at an oblique angle, ensuring uniform deposition by aligning the center of the substrate with the deposition source and optimizing the oblique angle between 43°-53° or 25°-35°, thereby increasing deposition efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If additional middle layers (EIL, ETL, HTL, HIL) are inserted between electrodes and emission layer, then light emission efficiency is improved, but shadow phenomenon occurs and deposition uniformity deteriorates

Engineering Contradiction:
Improvelight emission efficiencyVSAvoiddeposition uniformity
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

The deposition source is segmented into multiple spray nozzles arranged in a specific pattern, with each nozzle targeting specific regions. This segmentation allows different areas of the substrate to receive optimized deposition angles, preventing shadow phenomenon while maintaining uniformity across the entire deposition area.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the deposition source are designed with different spray angles and orientations. The spray nozzles are arranged to provide locally optimized deposition characteristics - some nozzles spray at oblique angles to cover edge regions and prevent shadowing, while others provide more perpendicular deposition for uniformity in central areas.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If spray nozzles are arranged to increase incident angle of deposition material, then shadow phenomenon is reduced, but device complexity increases

Engineering Contradiction:
Improvedeposition uniformityVSAvoidnozzle arrangement complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The spray nozzles are arranged asymmetrically with respect to the substrate, with different orientations and angles designed to match the specific geometric requirements of the deposition area. This asymmetric arrangement optimizes coverage and incident angles without requiring overly complex individual nozzle structures.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The solution moves from considering only vertical deposition (one dimension) to incorporating angular deposition in multiple dimensions. By arranging nozzles at different angles and orientations in three-dimensional space, the system achieves better coverage and reduces shadow phenomenon without significantly increasing the complexity of each individual nozzle component.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The controlled deposition apparatus enhances deposition uniformity and efficiency, reducing the shadow phenomenon and allowing for high-resolution OLED displays by optimizing the spray angle and arrangement of nozzles, ensuring effective material distribution on the substrate.

Implementation Method 1

a plurality of spray nozzles arranged on the center area of the deposition source along the first direction, the plurality of spray nozzles being configured to spray the deposition material toward a surface substrate

Methodology Applied
Scientific EffectSpray deposition: Deposition (physical)

Data Source

PatentUS10344372B2Depositing apparatus and method for manufacturing organic light emitting diode display using the same
Publication Date: 2019.07.09 SAMSUNG DISPLAY CO LTD
  • US10344372B2 patent drawing
  • US10344372B2 patent drawing
  • US10344372B2 patent drawing

AI summary

A deposition apparatus includes a deposition source containing a deposition material, the deposition source including a center area between two outer areas along a first direction, and a plurality of spray nozzles arranged on the center area of the deposition source along the first direction, the plurality of spray nozzles being configured to spray the deposition material toward a surface substrate, wherein the spray nozzles include first and second spray nozzles, the first spray nozzles having terminal ends thereof parallel to and facing the surface of the substrate, and the second spray nozzles having terminal ends thereof at an oblique angle with respect to the surface of the substrate.