OLED Deposition Shield Angle Optimization

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Solution Overview

Problem

The vacuum deposition method for forming organic thin films in OLED displays results in non-uniform thickness due to shadow effects caused by mask shields, leading to abnormal light emission and reduced resolution.

Innovation Solution

An organic material depositing device with a linear deposition source and adjustable shield plates is used, where the deposition angle is set to be greater than or equal to the taper angle of the mask, and the distance between the substrate and nozzles is optimized to reduce shadow effects and achieve uniform thickness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the deposition source is moved linearly in vacuum to output deposition material, then deposition efficiency is improved, but shadow effects from mask shields increase

Engineering Contradiction:
Improvedeposition efficiencyVSAvoidthickness uniformity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Multiple linear nozzles are merged into a single deposition source assembly, combining their deposition outputs to achieve both high efficiency and uniformity. The merged nozzles work simultaneously to deposit material across the substrate, maintaining productivity while reducing shadow effects through multi-point deposition

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The linear nozzles act as intermediaries between the deposition source and substrate, distributing material more evenly than a single source. These intermediary nozzles break up the direct line-of-sight deposition path, reducing shadow effects while maintaining deposition efficiency

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures substantially uniform light emission across the OLED display by minimizing shadow effects and improving thickness uniformity, enabling high-resolution displays.

Implementation Method 1

a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material

Methodology Applied
Scientific EffectSpray: Fluid Spray

Implementation Method 2

part of the deposition material particles are blocked (or intercepted) at the edge of the mask shield having a predetermined thickness, and are not deposited on the substrate. Because of the blocking influence by the shield, a shadow effect occurs

Methodology Applied
Scientific EffectShadow effect: Shadow

Data Source

PatentUS9515263B2Device and method for depositing organic material
Publication Date: 2016.12.06 SAMSUNG DISPLAY CO LTD
  • US9515263B2 patent drawing
  • US9515263B2 patent drawing
  • US9515263B2 patent drawing

AI summary

A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.