Organic Light-Emitting Display Deposition Using Patterning Slit Sheet

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Solution Overview

Problem

The existing deposition methods for organic light-emitting display devices, particularly using fine metal masks (FMMs), face challenges in manufacturing larger displays due to mask distortion and low production efficiency, as well as difficulties in achieving high-definition patterning and aligning substrates with large masks.

Innovation Solution

A method and apparatus for manufacturing organic light-emitting display devices using a patterning slit sheet and organic layer deposition apparatus, where the substrate and deposition apparatus are moved relative to each other, allowing for continuous deposition with a smaller patterning slit sheet that is easier to manufacture and reduces contact-related defects, enabling high-definition patterning on large substrates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a large fine metal mask is used for deposition on large substrates, then the entire substrate area can be covered, but the mask bends due to its own weight causing pattern distortion

Engineering Contradiction:
Improvesubstrate coverage areaVSAvoidpattern definition accuracy
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent divides the large substrate into multiple smaller deposition regions, each covered by a separate fine metal mask. This segmentation allows each mask to maintain structural rigidity and pattern accuracy while collectively covering the entire large substrate area through sequential deposition processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a temporal dimension to the deposition process by sequentially depositing organic layers on different regions of the substrate at different times. This allows the use of multiple smaller masks instead of one large mask, resolving the contradiction between coverage area and pattern precision.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If a fine metal mask is used for deposition, then patterned organic layers can be formed, but the processes of aligning substrate and mask, performing deposition, and separating mask are time-consuming

Engineering Contradiction:
Improvepattern alignment accuracyVSAvoidmanufacturing speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent pre-forms the fine metal masks with precise patterns before deposition. This preliminary preparation allows for rapid alignment and deposition processes during manufacturing, as the masks are already optimized for their specific deposition regions, reducing the time required for alignment and separation operations.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent employs a dynamic sequential deposition process where multiple smaller masks are used in succession rather than one large mask. This dynamic approach allows faster handling, alignment, and removal of individual masks compared to manipulating a single large mask, thereby improving manufacturing speed while maintaining pattern accuracy.

Inventive Principle:
Principle #15Dynamics

3Quantity of substance

If conventional deposition methods are used, then organic layers can be formed, but high-definition patterning is difficult to achieve

Engineering Contradiction:
Improveorganic layer formationVSAvoidpatterning definition
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The patent extracts the patterning function from the deposition process itself by using pre-patterned fine metal masks. These masks have precisely defined openings that directly transfer the desired high-definition pattern to the organic layer during deposition, eliminating the need for subsequent patterning steps and achieving high-definition patterns directly during organic layer formation.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances production efficiency and enables high-definition patterning on large substrates by reducing mask-related issues and improving alignment precision, facilitating mass production of organic light-emitting display devices with improved manufacturing speed and yield.

Implementation Method 1

an organic layer material is deposited on the FMM to form the organic layer having the desired pattern

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS9306191B2Organic light-emitting display apparatus and method of manufacturing the same
Publication Date: 2016.04.05 SAMSUNG DISPLAY CO LTD
  • US9306191B2 patent drawing
  • US9306191B2 patent drawing
  • US9306191B2 patent drawing

AI summary

An organic light-emitting display apparatus includes: a substrate; a plurality of thin film transistors on the substrate, each of the thin film transistors including an active layer, a gate electrode, and source and drain electrodes; first electrodes electrically connected to the plurality of thin film transistors, respectively, and being on respective pixels corresponding to the plurality of thin film transistors; organic layers on the first electrodes, respectively, and including light-emitting layers; auxiliary electrodes each of which is on at least a portion between adjacent organic layers of the organic layers; and a second electrode facing the first electrodes and covering the organic layers and the auxiliary electrodes.