Deposition Apparatus for OLED Manufacturing with Real-Time Thickness Monitoring
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Solution Overview
Problem
The existing deposition methods for organic light-emitting display devices using fine metal masks face challenges such as mask sagging due to self-gravity, leading to imprecise pattern formation and low production efficiency, especially when dealing with large substrates or multiple devices simultaneously.
Innovation Solution
A deposition apparatus with a moving unit and conveyer system that allows for real-time monitoring of layer thickness and uniformity, using a patterning slit sheet and deposition source nozzle, enabling precise deposition while maintaining a constant distance between the substrate and deposition assembly, and wireless data transmission for efficient process control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a large FMM is used to manufacture large organic light-emitting display devices or multiple devices simultaneously, then the production capacity is improved, but the mask sags due to self-gravity resulting in poor pattern precision
Solution Approach 1:
The patent extracts the patterning function from the traditional FMM and implements it through a slit sheet that defines deposition patterns. The FMM is replaced by a combination of a mask holder and a slit sheet, where the slit sheet can be easily replaced and does not suffer from sagging issues. This extraction allows the patterning function to be maintained while eliminating the gravitational sagging problem of large FMMs.
Solution Approach 2:
The patent uses a slit sheet that can be easily replicated and replaced, serving as a copyable patterning element. Instead of relying on a single large FMM that sags, multiple slit sheets can be used or the same slit sheet design can be replicated, ensuring consistent pattern precision across different production runs without the gravitational deformation issues of large FMMs.
2Manufacturing precision
If alignment and separation processes are performed carefully to maintain pattern precision, then the manufacturing precision is improved, but the manufacturing time increases resulting in low production efficiency
Solution Approach 1:
The patent introduces a movable mask holder that can dynamically adjust its position relative to the substrate. The mask holder can be moved closer to or farther from the substrate, allowing for easy alignment and quick separation without complex mechanical operations. This dynamic positioning system reduces the time required for alignment and separation while maintaining pattern precision through controlled movement.
Solution Approach 2:
The patent performs alignment marks placement and initial positioning before the actual deposition process. Alignment marks are pre-formed on the substrate, and the mask holder is pre-positioned based on these marks, enabling quick and accurate alignment without time-consuming adjustments during the deposition process. This preliminary action reduces the overall manufacturing time while ensuring pattern precision.
3Manufacturing precision
If real-time monitoring of deposition thickness is implemented, then the manufacturing precision is improved, but the device complexity increases
Solution Approach 1:
The patent incorporates a feedback mechanism where deposition thickness is monitored in real-time during the deposition process. The system measures the thickness of the deposited organic layer and provides feedback to control the deposition rate and duration, ensuring uniform thickness and preventing defects. This feedback loop maintains high manufacturing precision without requiring overly complex additional hardware, as it integrates monitoring and control within the existing deposition system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the precision and efficiency of forming intermediate layers in organic light-emitting display devices by allowing continuous deposition with real-time thickness monitoring, reducing manufacturing time and improving production efficiency for both large and multiple devices.
Implementation Method 1
A deposition unit that may include a chamber and at least one deposition assembly, and the at least one deposition assembly is separated from the substrate by a certain distance and a deposition material is deposited on the substrate
Data Source
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AI summary
A deposition apparatus is capable of checking, in real time, the thickness or uniformity of a thin layer which is formed. The deposition apparatus includes a moving unit (430) to which a substrate (2, 50) is detachably fixed. A conveyer unit (400) conveys the moving unit (430) in a first direction (A) or in an opposite direction to the first direction (A). A deposition unit (100) includes at least one deposition assembly (100-1, ...,100-11) for depositing a deposition material (115) on the substrate (2, 50). A discharge data acquisition unit (600) acquires data associated with the amount of the deposition material (115) discharged per unit time from the at least one deposition assembly (100-1, ..., 100-11). A transmission unit (610) transmits the data acquired by the discharge data acquisition unit (600).