OLED Multilayer Electrode Buffer Layer for Particle Reduction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The formation of electrodes on organic layers in organic light emitting diode (OLED) displays can lead to contamination of the substrate and reduced yield due to particle generation from the organic layer reacting with etching gases during the dry etching process.
Innovation Solution
The implementation of a multilayered electrode structure in OLED displays, which includes a transparent conductive oxidization film between the organic layer and the metal layer, and the use of a wet etching process to prevent reaction with etching gases, thereby reducing particle generation and improving yield.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a dry etching process is used to form electrodes on organic layers, then the etching process can be performed with good precision, but particles are generated from the organic layer reacting with etching gases, causing substrate contamination and reduced yield
Solution Approach 1:
A buffer layer is introduced between the organic layer and the electrode to serve as an intermediary. This buffer layer prevents direct contact and reaction between the organic layer and etching gases during the dry etching process, thereby eliminating particle generation while allowing the etching process to proceed with good precision.
2Adaptability or versatility
If multiple masks are used to form electrodes in OLED displays, then the pixel configuration can be achieved, but the process complexity increases and yield decreases due to particle generation from organic layer reaction
Solution Approach 1:
The buffer layer acts as a mediator that enables the formation of complex pixel configurations with multiple masks without causing particle generation. By preventing organic layer degradation during each etching step, the buffer layer allows multiple patterning operations to be performed while maintaining high yield.
3Device complexity
If electrodes are formed directly on organic layers, then the device structure can be simplified, but substrate contamination occurs due to particle generation from organic layer reaction with etching gases
Solution Approach 1:
The buffer layer serves as a protective intermediary between the organic layer and the electrode. It prevents direct reaction between the organic layer and etching gases, thereby avoiding particle generation and substrate contamination while still allowing for a relatively simplified device structure.
4Strength
If the organic layer is exposed during electrode formation, then the electrode can be formed with proper adhesion, but the exposed organic layer reacts with etching gases to generate particles that reduce manufacturing yield
Solution Approach 1:
The buffer layer acts as an intermediary that protects the organic layer from etching gas attack while still allowing the electrode to be formed with proper adhesion. The buffer layer prevents particle generation that would otherwise reduce manufacturing yield, while the electrode formation process maintains good adhesion to the underlying structures.
Data Source
AI summary
An organic light emitting diode display includes a substrate, a semiconductor layer disposed on the substrate, a first insulating layer which covers the semiconductor layer, a first conductive layer disposed on the first insulating layer, a second insulating layer which covers the first conductive layer, a second conductive layer disposed on the second insulating layer, a third insulating layer which covers the second conductive layer, a third conductive layer disposed on the third insulating layer, a first organic layer which covers the third conductive layer, and a fourth conductive layer disposed on the first organic layer, where the fourth conductive layer includes a lower layer, a middle layer, and an upper layer, and the lower layer is disposed between the first organic layer and the middle layer, and includes a transparent conductive oxidization film.