OLED Electrode Dry Cleaning for Organic Residue Removal

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Solution Overview

Problem

Existing display apparatuses face challenges in extending the life of light-emitting devices, particularly due to organic residues that can contaminate the electrodes and reduce the efficiency and lifespan of the organic light-emitting diodes (OLEDs).

Innovation Solution

A method of manufacturing a display apparatus that involves forming a first electrode on a substrate, creating a pixel-defining layer with an opening exposing part of the first electrode, and performing a dry cleaning process using oxygen gas to form an indium-fluorine bond on the exposed surface of the first electrode, thereby removing organic residues and improving the electrode's surface properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a pixel-defining layer is formed on the first electrode to define pixel patterns, then the pixel structure is improved, but organic residues remain on the exposed electrode surface reducing OLED life

Engineering Contradiction:
Improvepixel pattern definitionVSAvoidOLED life
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The dry cleaning process is performed as a preliminary action after forming the pixel-defining layer and before forming the intermediate layer. This timing removes organic residues from the exposed first electrode surface, preventing contamination of subsequent layers and extending OLED life while maintaining the pixel pattern definition provided by the pixel-defining layer

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The organic residues that remain after pixel-defining layer formation are converted from harmful contaminants into targets for selective removal. The dry cleaning process specifically targets and removes these organic residues through oxygen plasma treatment, transforming the harmful presence of organic material into a controlled cleaning step that improves OLED reliability without affecting the pixel pattern structure

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Reliability

If the first electrode surface is cleaned to remove organic residues, then OLED life is extended, but the cleaning process must be precisely controlled to avoid damaging the electrode

Engineering Contradiction:
ImproveOLED lifeVSAvoidelectrode surface integrity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The dry cleaning process uses controlled parameter changes including oxygen gas flow rate, pressure, and treatment time to achieve effective organic residue removal while maintaining electrode surface integrity. By adjusting these parameters, the cleaning process selectively removes organic contaminants without damaging the conductive material of the first electrode

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Oxygen plasma is used as a strong oxidant in the dry cleaning process to accelerate the oxidation and removal of organic residues from the electrode surface. This method provides efficient cleaning through chemical oxidation rather than mechanical removal, extending OLED life while preserving the electrode's physical structure when properly controlled

Inventive Principle:
Principle #38Strong oxidants (Accelerated oxidation)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed method effectively extends the life of the light-emitting devices by removing organic residues and forming an indium-fluorine bond, which enhances the hole injection characteristics and improves the overall performance and longevity of the OLEDs.

Implementation Method 1

performing a first dry cleaning on a surface of the at least part of the first electrode that is exposed through the opening. An indium-fluorine bond may be formed on the surface of the at least part of the first electrode through the first dry cleaning

Methodology Applied
Scientific EffectDry cleaning (Plasma treatment): Plasma

Implementation Method 2

The performing of the first dry cleaning may include removing an organic residue from the surface of the at least part of the first electrode. The performing of the first dry cleaning may use an oxygen gas

Methodology Applied
Scientific EffectOxidation: Oxidation

Data Source

PatentUS20250151596A1Display apparatus and method of manufacturing the same
Publication Date: 2025.05.08 SAMSUNG DISPLAY CO LTD
  • US20250151596A1 patent drawing
  • US20250151596A1 patent drawing
  • US20250151596A1 patent drawing

AI summary

A method of manufacturing a display apparatus includes forming a first electrode on a substrate, forming a pixel-defining layer on the first electrode, the pixel-defining layer including an opening through which at least part of the first electrode is exposed, and performing a first dry cleaning on a surface of the at least part of the first electrode that is exposed through the opening. An indium-fluorine bond is formed on the surface of the at least part of the first electrode through the first dry cleaning.