OLED Evaporation Apparatus with Movable Outer Plate

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Solution Overview

Problem

Current evaporation apparatuses for OLED manufacturing face inefficiencies in adjusting the thickness of functional layers, requiring time-consuming temperature changes and exposing electrical circuits to high temperatures, leading to damage and sticking issues.

Innovation Solution

An evaporation apparatus with an inner and outer plate configuration that allows for adjustable evaporation range by moving the outer plate, enabling quick adjustment of evaporation rate and thickness of film layers, while protecting electrical circuits from high temperatures and material sticking.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If temperature is changed to adjust evaporation rate, then film layer thickness can be adjusted, but adjustment time increases significantly

Engineering Contradiction:
Improvefilm layer thicknessVSAvoidadjustment time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent introduces a movable plate that can dynamically adjust the evaporation range by changing its position relative to the evaporation source. This dynamic mechanical adjustment allows rapid modification of the evaporation rate without requiring temperature changes, thereby resolving the contradiction between manufacturing precision (film thickness control) and loss of time (adjustment speed). The movable plate creates different evaporation ranges by varying its distance from the evaporation source, enabling quick switching between high and low evaporation rates.

Inventive Principle:
Principle #15Dynamics

2Ease of operation

If electrical circuits are exposed during evaporation process, then operation is simplified, but circuits suffer damage from high temperature and material sticking

Engineering Contradiction:
Improveoperation simplicityVSAvoidcircuit stability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent introduces a plate structure as an intermediary element between the evaporation source and the electrical circuits. This plate serves multiple functions: it shields the circuits from direct exposure to high temperatures and evaporated materials, preventing damage and sticking issues, while still allowing the system to operate effectively. The plate can be positioned to provide necessary shielding without completely blocking the evaporation process, thus maintaining reliability while preserving ease of operation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances production efficiency by allowing rapid adjustment of film layer thickness and protects electrical components, improving the stability and longevity of the evaporation apparatus.

Implementation Method 1

an evaporation source 110 on the operation platform 900

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

the inner plate 120...is able to detect an evaporation rate of the evaporation source 110

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Data Source

PatentEP3633065B1Evaporation device
Publication Date: 2023.08.16 BOE TECHNOLOGY GROUP CO LTD
  • EP3633065B1 patent drawingFigure 1~2
  • EP3633065B1 patent drawingFigure 3~4
  • EP3633065B1 patent drawingFigure 5~6

AI summary

An evaporation apparatus is disclosed. The evaporation apparatus includes an operation platform (900); an evaporation source (110) on the operation platform (900); an inner plate (120) on at least one side of the evaporation source (110), the inner plate (120) being fixedly connected to the evaporation source (110); and an outer plate (130) on a side of the inner plate (120) away from the evaporation source (110), the outer plate (130) being adjacent to the inner plate (120). The inner plate (120) can be configured to detect an evaporation rate of the evaporation source, and the outer plate (130) can adjust an evaporation range.