OLED Gate and Capacitor Electrode Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing manufacturing processes for organic light emitting devices require multiple masks, leading to increased manufacturing time and cost due to complex mask setups and alignment challenges.
Innovation Solution
The proposed solution involves reducing the number of masks by simultaneously forming the first gate electrode and capacitor electrode with the same edge in a plane view, using a halftone mask and dry etching techniques to create the necessary structures, thereby simplifying the manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple masks are used for manufacturing the organic light emitting device, then the manufacturing precision can be maintained, but the manufacturing time and cost increase
Solution Approach 1:
The patent combines the formation of the gate electrode and capacitor electrode into a single etching process using one mask pattern. The mask is designed with a specific pattern that defines both electrodes simultaneously, eliminating the need for separate masking steps. This merging of operations reduces manufacturing time while maintaining alignment precision because both electrodes are formed in the same process step with a single mask alignment.
Solution Approach 2:
The single mask serves multiple functions by simultaneously defining the gate electrode pattern and the capacitor electrode pattern. The mask pattern is designed to create both electrodes in one application, making the mask a multi-functional tool that replaces what would traditionally require multiple specialized masks. This universal approach reduces the total number of masking operations while ensuring proper alignment between the two electrodes.
2Manufacturing precision
If multiple masks are used for manufacturing the organic light emitting device, then the manufacturing precision can be maintained, but the manufacturing cost increases
Solution Approach 1:
The patent merges the masking operations for the gate electrode and capacitor electrode into a single masking step. By designing a unified mask pattern that defines both electrodes simultaneously, the process eliminates the need for multiple mask purchases, multiple mask alignment operations, and the associated labor costs. This consolidation directly reduces manufacturing cost while preserving the precision needed for proper electrode alignment.
Solution Approach 2:
The patent extracts the capacitor electrode formation from the traditional multi-step process and integrates it with the gate electrode formation. Instead of using separate masks for each electrode, the design extracts the capacitor electrode pattern definition and combines it with the gate electrode mask pattern, thereby eliminating redundant masking steps and reducing overall manufacturing cost.
3Reliability
If the gate electrode and capacitor electrode are formed separately, then the manufacturing process is more controllable, but the manufacturing time increases
Solution Approach 1:
The patent combines the formation of the gate electrode and capacitor electrode into a single etching operation using one mask. This merging reduces the total number of process steps, eliminating intermediate handling and alignment operations between separate electrode formations. The single-step approach increases manufacturing throughput while maintaining process controllability through a unified etching process that forms both electrodes simultaneously under controlled conditions.
4Manufacturing precision
If traditional multi-mask processes are used, then each electrode can be precisely controlled, but unwanted capacitance is generated outside designed regions
Solution Approach 1:
The patent merges the pattern definition of the gate electrode and capacitor electrode into a single mask design. This unified approach ensures that the edges of both electrodes are precisely aligned according to the mask pattern, preventing the formation of unwanted capacitance regions. The single mask pattern is specifically designed to define the exact boundaries of both electrodes, eliminating misalignment that would create parasitic capacitance outside the designed regions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces manufacturing time and cost while improving display quality by minimizing errors in storage capacitance and reducing unwanted capacitance outside the designed regions.
Implementation Method 1
using a halftone mask and dry etching techniques to create the necessary structures
Data Source
AI summary
An organic light emitting device includes: a substrate; a first thin film transistor including a first active pattern positioned on the substrate and a first gate electrode positioned on the first active pattern; an organic light emitting element connected to the first active pattern; and a capacitor electrode overlapping the first gate electrode on the first gate electrode and having the same edge as the first gate electrode.