OLED Deposition Mask With Variable Thickness Dummy Patterns

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Solution Overview

Problem

Existing mask assemblies used in organic light emitting display manufacturing are prone to deformation due to tensile forces, which complicates the patterning of organic emission layers and makes it difficult to maintain isolation from moisture and oxygen.

Innovation Solution

A mask assembly with a mask main body of varying thickness, including active patterns and dummy patterns, is designed to absorb and spread tensile forces, maintaining rigidity and controlling deformation. The mask assembly features a frame with openings and multiple masks arranged in a band shape, where the active patterns have a smaller thickness than the main body, and dummy patterns with intermediate thicknesses are placed between active patterns and the mask edges, distributing the tensile force effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a mask assembly is used for depositing organic layers in OLED manufacturing, then precise patterning can be achieved, but the mask deforms due to tensile forces applied during the process

Engineering Contradiction:
Improvepatterning precisionVSAvoidmask shape stability
Core Design Contradiction:
Manufacturing precisionVSStability of the object's composition

Solution Approach 1:

The mask is divided into multiple independent active patterns separated from each other, allowing each pattern to be supported independently by the frame. This segmentation prevents cumulative deformation across the entire mask and enables localized stability control for each patterning region.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the mask have different thicknesses - the active patterns have a first thickness optimized for patterning precision, while the areas between patterns have a second thickness that provides structural support and resistance to tensile forces. This local quality variation allows the mask to simultaneously achieve precision and stability.

Inventive Principle:
Principle #3Local quality

2Stability of the object's composition

If the mask main body thickness is reduced to minimize deformation, then flexibility increases, but the rigidity required to maintain pattern integrity is compromised

Engineering Contradiction:
Improvedeformation controlVSAvoidmask rigidity
Core Design Contradiction:
Stability of the object's compositionVSStrength

Solution Approach 1:

The mask employs a local quality principle by varying the thickness across different regions. The active pattern areas maintain a thinner first thickness to minimize deformation, while the inter-pattern regions have a thicker second thickness to provide the necessary rigidity and strength against tensile forces, thus achieving both deformation control and structural integrity.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The mask can be constructed using composite material structures with varying thickness profiles, combining regions of different mechanical properties. This allows the thinner active pattern regions to remain flexible and resistant to deformation, while the thicker support regions provide the required rigidity and strength.

Inventive Principle:
Principle #40Composite materials

3Reliability

If dummy patterns are added to absorb tensile forces, then active pattern stability improves, but the mask structure becomes more complex

Engineering Contradiction:
Improveactive pattern stabilityVSAvoidmask structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The dummy patterns are strategically placed only in the regions between active patterns where tensile forces are most problematic. This localized approach provides the necessary force absorption and support without adding complexity to the entire mask structure, maintaining simplicity in the active patterning regions while enhancing stability in the support regions.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS9583708B2Mask for deposition, mask assembly including the same and method of forming the mask assembly
Publication Date: 2017.02.28 SAMSUNG DISPLAY CO LTD
  • US9583708B2 patent drawing
  • US9583708B2 patent drawing
  • US9583708B2 patent drawing

AI summary

A mask for deposition includes a mask main body extended in a first direction and having a first thickness, and including ends opposite to each other in the first direction and supported by a frame while a tensile force is applied to the mask in the first direction; and a plurality of active patterns separated from each other in the first direction in a center area of the mask main body, and having a second thickness less than the first thickness.