Open Mask Half-Etching for OLED Line Protection

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Solution Overview

Problem

Existing methods for manufacturing organic light emitting display panels often result in damage to gate lines or data driver lines, leading to reliability issues such as burning phenomena or shorts, due to the interaction with open masks during the deposition process.

Innovation Solution

The method involves using an open mask with a half-etching portion in the non-display area to prevent lines from contacting the mask, thereby preventing defects and ensuring precise patterning by maintaining a sufficient distance between the substrate and the mask edge, and forming a thin film layer with a non-opening portion to block source material in non-display areas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If an open mask is used during the deposition process, then the manufacturing precision of the thin film layer is improved, but the gate lines or data driver lines in the non-display area may be damaged due to contact with the mask

Engineering Contradiction:
Improvepatterning precisionVSAvoidline integrity
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent introduces a third dimension (vertical height) by forming a protruding structure on the mask at the position corresponding to the line crossing in the non-display area. This protrusion creates a physical gap between the mask and the lines, preventing contact damage while maintaining the mask's patterning function in the display area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The protruding structure on the mask acts as an intermediary element that separates the mask body from the vulnerable line region. This intermediate structure allows the mask to maintain its positioning function while preventing direct contact between the mask and the lines, thus protecting the lines from damage.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the mask is positioned close to the substrate for precise deposition, then the deposition accuracy is improved, but the risk of line damage or burning phenomena increases

Engineering Contradiction:
Improvedeposition accuracyVSAvoidline damage risk
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

By adding vertical height through the protruding structure, the patent creates a spatial buffer zone between the mask and the lines. This allows the mask to be positioned close to the substrate for accurate deposition while the protrusion prevents harmful contact with the lines in the non-display area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The mask is modified locally at the specific position corresponding to the line crossing, creating a protruding structure only where needed. This localized modification protects the vulnerable line region without affecting the mask's overall positioning and deposition accuracy function.

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If the mask covers the entire non-display area to block source material, then the purity of the thin film layer is improved, but the complexity of the mask structure and manufacturing process increases

Engineering Contradiction:
Improvefilm layer purityVSAvoidmask structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

Instead of uniformly modifying the entire mask, the patent applies a localized protruding structure only at the specific position where lines cross in the non-display area. This maintains the mask's simplicity elsewhere while providing targeted protection and source material blocking where needed.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The mask structure is segmented into different functional regions: the main mask body for blocking source material and forming the thin film layer, and a localized protruding structure for protecting lines. This segmentation allows each part to perform its specific function efficiently without unnecessary complexity.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the reliability of the organic light emitting display panel by preventing line damage and defects, ensuring accurate deposition and reducing the risk of shorts or burning phenomena, thereby improving the overall manufacturing process.

Implementation Method 1

forming a thin film layer using an open mask with a size corresponding to the display area... the open mask includes a non-opening portion blocking a source material used to deposit the thin film layer

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS9065078B2Method of manufacturing organic light emitting display panel
Publication Date: 2015.06.23 SAMSUNG DISPLAY CO LTD
  • US9065078B2 patent drawing
  • US9065078B2 patent drawing
  • US9065078B2 patent drawing

AI summary

A method of manufacturing an organic light emitting display panel is disclosed. The method may include forming a thin film layer using an open mask. The open mask may include forming a half-etching portion disposed over at least a portion of a non-display area. The non-display area may include a portion in which a first line crosses a second line. In a final product, a distance between a substrate and a lower surface of the half-etching portion may be longer than the distance between the substrate and a lower surface of a non-opening portion. Because of the half-etching portion, lines disposed in the non-display area may be prevented from contacting the open mask.