OLED Mask Repair Using 3D Defect Imaging and Laser Ablation
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Solution Overview
Problem
The increasing demand for high-resolution OLED display devices poses challenges in maintaining the precision of mask openings, as abnormal openings can lead to defects in organic light emitting devices, affecting the display's performance and reliability.
Innovation Solution
A mask repairing apparatus and method that utilize a stereoscopic imaging unit to measure and compare the mask's surface profile with a normal image, producing defect images, and a laser unit to sequentially remove deficient parts by irradiating a laser beam in multiple directions, ensuring precise correction of abnormal openings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the number of openings in the mask is increased to achieve high-resolution OLED displays, then the display resolution is improved, but the precision of mask openings deteriorates due to increased complexity and difficulty in maintaining opening precision
Solution Approach 1:
The patent performs preliminary detection of abnormal openings in the mask before the OLED fabrication process using stereoscopic imaging. By identifying and repairing defects in advance, the system ensures that only masks with precise openings are used for high-resolution display fabrication, thereby maintaining manufacturing precision while enabling increased opening density for higher resolution
Solution Approach 2:
The patent replaces traditional mechanical inspection methods with stereoscopic imaging technology to detect mask opening abnormalities. This optical-based detection system provides more precise measurement capabilities for identifying subtle opening defects, enabling the system to maintain manufacturing precision even as the number of openings increases for higher display resolution
2Device complexity
If traditional inspection methods are used to detect mask abnormalities, then the detection process is simple, but the detection precision deteriorates leading to undetected abnormal openings
Solution Approach 1:
The patent transitions from two-dimensional planar inspection to three-dimensional stereoscopic imaging for mask detection. By capturing and analyzing depth information in addition to surface features, the system achieves superior detection precision for abnormal openings while managing complexity through automated image processing algorithms
3Ease of manufacture
If abnormal openings in the mask are not repaired, then the mask can be used as-is, but the reliability of OLED fabrication deteriorates due to defects in organic light emitting devices
Solution Approach 1:
The patent implements an automated mask repair system that detects and corrects abnormal openings without requiring manual intervention. The system automatically identifies defects through stereoscopic imaging and repairs them using laser ablation, maintaining ease of manufacture while ensuring high reliability by eliminating defects that would otherwise cause OLED failures
Solution Approach 2:
The patent converts the potentially harmful effect of undetected mask defects into a benefit by using the detected abnormal openings as targets for automated repair. The laser ablation process precisely removes defective material, transforming masks with abnormalities into masks with corrected, reliable openings, thereby improving OLED fabrication reliability while maintaining manufacturing efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise removal and repair of abnormal openings, enhancing the mask's performance and reliability, thereby improving the fabrication of high-resolution OLED displays by converting abnormal openings into normal ones, reducing failure ratios and ensuring consistent organic light emitting device quality.
Implementation Method 1
irradiating a laser beam onto a deficient part of the mask to remove the deficient part
Data Source
AI summary
A mask repairing apparatus may include a stage, a stereoscopic imaging unit to measure a stereoscopic image of a mask on the stage, a control unit to compare the stereoscopic image with a normal image of the mask and to produce a defect image of the mask, and a laser unit to irradiate a laser beam onto a deficient part of the mask, under control of the control unit. The control unit may control the laser unit, based on the defect image, such that the laser beam is sequentially irradiated onto m multiple layers of the deficient part while repeatedly moving in a first direction and a second direction crossing each other.