Magnetic Adsorption for OLED Mask Plate Deformation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Thin metal mask plates used in OLED vapor deposition are prone to deformation, leading to loose fitting and incorrect patterns during the deposition of organic light emitting materials for RGB sub-pixels, affecting the quality of the display.
Innovation Solution
A vapor deposition apparatus with a magnetic adsorption apparatus that includes magnetic blocks arranged in a matrix on the substrate side, along with a towing apparatus to adjust the magnetic blocks' height, ensuring the metal mask plate fits closely and maintains consistent magnetic fields to prevent deformation and ensure accurate pattern formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a thin metal mask plate is used for vapor deposition, then the device complexity is reduced and ease of manufacture is improved, but the mask plate deforms easily leading to loose fitting and incorrect patterns
Solution Approach 1:
A magnetic field is introduced as an intermediary force between the mask plate and substrate. Magnetic blocks generate a magnetic field that applies attractive force to the metal mask plate, causing it to closely fit the substrate without mechanical contact or additional clamping structures.
Solution Approach 2:
The patent replaces mechanical fastening or clamping systems with a magnetic field-based holding system. The magnetic attraction force substitutes for mechanical pressure, eliminating the need for complex mechanical fixation structures while maintaining mask plate stability.
2Reliability
If the magnetic field strength is increased to improve mask plate adhesion, then the fitting is improved, but the mask plate may deform due to excessive magnetic force
Solution Approach 1:
The magnetic field is divided into multiple independent magnetic blocks arranged in an array. This segmentation allows the total magnetic force to be distributed across multiple smaller units, preventing excessive concentrated force on any single area of the mask plate while maintaining overall adhesion.
Solution Approach 2:
Different magnetic blocks can be independently adjusted to provide locally optimized magnetic field strength. The towing apparatus allows each magnetic block to be positioned at optimal heights, creating non-uniform magnetic field distribution that adapts to local requirements for adhesion while avoiding excessive force anywhere.
3Manufacturing precision
If multiple magnetic blocks are used to ensure uniform magnetic field, then the fitting uniformity is improved, but the device complexity increases
Solution Approach 1:
The magnetic blocks are made adjustable in height through the towing apparatus, transforming a static magnetic field system into a dynamic one. This allows the magnetic field configuration to be optimized and adjusted, providing uniform field distribution across the substrate area while maintaining manageable system complexity through standardized adjustment mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures precise fitting and consistent magnetic fields, resulting in correct pattern formation during vapor deposition, enhancing the quality and accuracy of OLED displays by preventing mask plate deformation.
Implementation Method 1
by the magnetic fields produced by the plurality of magnetic blocks comprised by the adsorption apparatus
Implementation Method 2
the metal mask plate may be caused to closely fit the substrate to be vapor deposited over it
Implementation Method 3
an organic light emitting material layer is generally formed by vacuum evaporation coating of the organic material
Data Source
AI summary
Disclosed is a vapor deposition apparatus comprising an adsorption apparatus disposed in a vapor deposition cavity, wherein the adsorption apparatus comprising: a plurality of magnetic blocks arranged in a matrix disposed on a side of a substrate to be vapor deposited away from a metal mask plate, and a towing apparatus for adjusting each of the magnetic blocks to move up and down relative to the substrate to be vapor deposited. Such a vapor deposition apparatus may cause the metal mask plate to closely fit the substrate to be vapor deposited, such that a correct pattern will be formed when sub-pixel units are vapor deposited, and cause the magnetic fields of all the magnetic blocks to tend to be consistent, avoiding affecting the above-mentioned pattern by a deformation of the metal mask plate due to the inhomogeneity of the magnetic fields.