OLED Mask-Support Assembly for Alignment Stability
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Solution Overview
Problem
Conventional OLED manufacturing processes face challenges in aligning large-area masks accurately and preventing mask deformation, such as sagging or twisting, which can lead to pixel deposition failures, especially in ultra-high-resolution applications.
Innovation Solution
A mask-support assembly is developed, comprising a support with an edge portion and a grid portion, and a mask with specific surface compositions and a magnetic domain structure. The mask is connected to the support via a connection portion, and at least a part of the mask is disposed in a trench portion of the support, enhancing alignment and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large-area mask is used for OLED pixel deposition, then the deposition area is sufficient, but the mask sags or twists under load and cannot be well aligned
Solution Approach 1:
The support structure is segmented into multiple rigid legs extending from a central hub, with the mask divided into multiple segments that can be independently positioned and secured. This segmentation allows each mask segment to be precisely aligned and fixed without the sagging or twisting issues that affect large continuous masks, while still providing sufficient total deposition area.
Solution Approach 2:
The invention transitions from a planar mask support to a three-dimensional structure with legs extending vertically from a central hub. This dimensional change allows the mask to be positioned at an optimal height above the substrate, improving alignment precision while preventing contact-related deformation.
2Manufacturing precision
If a thin mask film is used for fine metal mask method, then the mask pattern resolution is high, but the mask deforms under load during welding and fixing
Solution Approach 1:
The mask structure is designed with local quality variations where the mask film thickness or material properties can be optimized for different regions. The mask patterns maintain thin film characteristics for high resolution, while the support structure and connection regions provide enhanced strength and rigidity to prevent deformation under load during welding and fixing operations.
Solution Approach 2:
The mask assembly combines the thin mask film with a more robust support structure featuring a central hub and multiple legs. This composite construction allows the thin film to provide high-resolution patterning while the stronger support structure prevents sagging and twisting during the welding and fixing processes.
3Manufacturing precision
If the mask is positioned close to the substrate for fine metal mask method, then the deposition precision is high, but any mask deformation causes pixel deposition failure
Solution Approach 1:
The invention elevates the mask from a position close to the substrate to a higher position supported by vertical legs extending from a central hub. This dimensional change maintains high deposition precision through accurate positioning while the elevated, stable support structure prevents deformation that would cause pixel deposition failures.
Solution Approach 2:
The central hub and leg structure serve as an intermediary between the mask and the deposition system, providing a stable, deformation-free support that allows the mask to maintain precise positioning without the reliability issues caused by direct contact or inadequate support.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables clear alignment of the mask, preventing deformation and ensuring stable pixel deposition, thereby achieving ultra-high definition pixels for microdisplays, particularly in virtual reality devices.
Implementation Method 1
the mask may be formed on the silicon wafer by electroforming
Data Source
AI summary
The present invention relates to a mask-support assembly and a producing method thereof. The mask-support assembly according to the present invention is a mask-support assembly for use in a process of forming organic light emitting diode (OLED) pixels on a semiconductor wafer and may include: a support including an edge portion and a grid portion; and a mask connected onto the support and having a plurality of mask patterns formed therein, wherein the composition of a first surface, which is a lower surface of the mask, and a second surface, which is a side surface of the mask pattern, differs from the composition of a third surface, which is an upper surface of the mask.