OLED Pixel Electrode Dry Cleaning for Residue Removal
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Solution Overview
Problem
Existing display apparatus manufacturing methods fail to effectively remove organic residues from the surface of pixel electrodes, leading to reduced OLED lifespan and image quality.
Innovation Solution
A method involving multiple dry cleaning processes using oxygen and nitrogen gases, with specific flow rates, pressures, and power applications to remove organic residues and enhance the surface characteristics of pixel electrodes, including forming a pixel electrode, a pixel defining layer, and an opposite electrode, while applying source and bias power during these processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional cleaning methods are used, then the manufacturing process is simple, but organic residues remain on the pixel electrode surface reducing OLED lifespan
Solution Approach 1:
The patent applies parameter changes by optimizing the oxygen plasma treatment conditions including oxygen flow rate (1,200-3,600 sccm), pressure (5-35 mTorr), and power (500-1,500 W source power, 750-2,250 W bias power) to effectively remove organic residues while preventing electrode damage, thereby extending OLED lifespan without excessive process complexity
Solution Approach 2:
The patent uses oxygen plasma as a strong oxidizing environment to accelerate the removal of organic residues from the pixel electrode surface. The oxygen plasma treatment performs first and second dry cleaning steps that oxidize and remove carbon-based contaminants, significantly improving OLED reliability through enhanced surface purification
2Manufacturing precision
If high oxygen flow rate is used for first dry cleaning, then organic residue removal is effective, but process control becomes more difficult
Solution Approach 1:
The patent implements feedback control by monitoring and adjusting oxygen flow rate within the specific range of 1,200-3,600 sccm, pressure at 5-35 mTorr, and power levels (500-1,500 W source, 750-2,250 W bias) to optimize organic residue removal while maintaining stable and controllable process conditions through parameter interdependence
3Reliability
If multiple dry cleaning processes are performed, then surface characteristics are improved, but manufacturing time increases
Solution Approach 1:
The patent segments the cleaning process into two distinct dry cleaning steps: first dry cleaning with high oxygen flow (1,200-3,600 sccm) for bulk organic residue removal, and second dry cleaning with lower oxygen flow (20 sccm or less) for surface refinement. This segmentation allows each step to target specific contamination levels, improving surface characteristics while managing total process time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method significantly increases the lifespan of light-emitting devices by improving surface characteristics and aperture ratio, resulting in enhanced luminance and extended operational hours of OLEDs.
Implementation Method 1
performing first dry cleaning by adding oxygen gas (O2) to a surface of the pixel electrode exposed by the opening in the pixel defining layer
Implementation Method 2
performing first dry cleaning by adding oxygen gas (O2) to a surface of the pixel electrode exposed by the opening in the pixel defining layer, wherein the oxygen gas (O2) is added at a flow rate in a range of about 1,200 sccm to about 3,600 sccm
Data Source
AI summary
A method of manufacturing a display apparatus includes: forming a pixel electrode on a substrate; forming a pixel defining layer covering at least an edge of the pixel electrode and including an opening exposing a part of the pixel electrode; performing first dry cleaning by adding oxygen gas (O2) to a surface of the pixel electrode exposed by the opening in the pixel defining layer, wherein the oxygen gas (O2) is added at a flow rate in a range of about 1,200 sccm to about 3,600 sccm; performing second dry cleaning after the first dry cleaning; forming an intermediate layer on the pixel electrode after the second dry cleaning; and forming an opposite electrode on the intermediate layer and the pixel defining layer.