OLED Pixel Electrode Stacked Structure Halftone Masking
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Solution Overview
Problem
The existing manufacturing processes for organic light emitting diode (OLED) displays require multiple masks, leading to increased production costs and reduced productivity, as they struggle to assign distinct characteristics to various electrodes while maintaining luminous efficiency and preventing high driving voltage.
Innovation Solution
A simplified manufacturing method that forms source and drain electrodes with a first conductive layer and a pixel electrode with a stacked structure of a first and second conductive layer, using halftone exposure to differentiate electrode configurations without increasing the number of masks, thereby assigning needed characteristics to each electrode.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple masks are used to form different electrodes with distinct characteristics, then the electrodes can be properly configured with needed characteristics, but the production cost increases and productivity decreases
Solution Approach 1:
The patent combines the formation of source electrode, drain electrode, and pixel electrode into a single patterning step using one mask. The mask is designed with different透光率 (transparency) regions that allow different conductive layers to be exposed in different areas, enabling multiple electrodes with distinct characteristics to be formed simultaneously without requiring multiple separate masking steps.
Solution Approach 2:
The patent introduces a new dimension of control by using mask transparency rather than just mask pattern geometry. By varying the transparency of different mask regions, the invention controls which conductive layers are exposed and deposited in specific areas, enabling differentiation of electrode characteristics without additional masking layers or steps.
2Reliability
If multiple masks are used to form different electrodes with distinct characteristics, then the electrodes can be properly configured with needed characteristics, but the production cost increases
Solution Approach 1:
The patent combines the formation of source electrode, drain electrode, and pixel electrode into a single patterning step using one mask. The mask is designed with different透光率 (transparency) regions that allow different conductive layers to be exposed in different areas, enabling multiple electrodes with distinct characteristics to be formed simultaneously without requiring multiple separate masking steps.
Solution Approach 2:
The single mask serves multiple functions by having different transparency regions that control the formation of different electrode types. The mask simultaneously defines the patterns for source electrodes, drain electrodes, and pixel electrodes while controlling the deposition of different conductive layers, replacing what would traditionally require multiple specialized masks.
3Ease of manufacture
If source and drain electrodes use a single conductive layer, then the manufacturing process is simplified, but the light emitting characteristics and corrosion resistance are insufficient
Solution Approach 1:
The patent applies different stacked structures to different electrode types based on their specific requirements. The pixel electrode uses a multi-layer stacked structure (first conductive layer + second conductive layer) to achieve excellent light emitting characteristics and corrosion resistance, while the source and drain electrodes use a single conductive layer structure, optimizing each electrode type for its specific function.
Solution Approach 2:
The patent changes the structural parameter (number of layers) of the conductive stack based on the electrode type and functional requirements. The pixel electrode employs a two-layer conductive structure to enhance light emission and durability, while source and drain electrodes use a single-layer structure sufficient for their electrical connection functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces production costs, improves light emitting characteristics, and prevents corrosion, while maintaining efficient electrode formation with different stacked configurations, enhancing the overall performance of the OLED display.
Implementation Method 1
The patterning of the first conductive layer and the second conductive layer may use a photosensitive layer pattern formed by halftone exposure.
Data Source
AI summary
An organic light emitting diode (OLED) display that includes a substrate, a thin film transistor, and a pixel electrode. The thin film transistor is formed on the substrate and includes a semiconductor layer, a gate electrode, a source electrode, and a drain electrode. The pixel electrode is electrically connected to the thin film transistor and is formed on the same layer as the source electrode and the drain electrode. The source electrode and the drain electrode include a first conductive layer, and the pixel electrode includes a first conductive layer and a second conductive layer stacked thereon.


