Load-Locked OLED Printing With Partitioned Chambers for Film Purity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional methods for depositing organic light-emitting device (OLED) films face challenges in achieving high uniformity, purity, and thickness control while scaling to large areas, with existing techniques either being inefficient or impractical for commercialization, and there is a need for a method that combines the benefits of ink jet printing and vapor deposition.
Innovation Solution
A load-locked thermal jet printing system that uses gas bearings to support and transport substrates within a housing with partitioned chambers, maintaining a non-oxidizing environment and pulsatingly delivering material from a thermal jet discharge nozzle to ensure precise and efficient deposition of OLED materials, minimizing nitrogen loss and oxidation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If thermal evaporation is used to deposit OLED films, then film uniformity and purity are improved, but material efficiency deteriorates due to coating the entire substrate area
Solution Approach 1:
The patent applies local quality by using a shadow mask with patterned openings that allow vapor to deposit material only in specific regions of the substrate. This creates spatially varying deposition characteristics, enabling precise control over where material is deposited while maintaining film uniformity in the targeted areas.
Solution Approach 2:
The substrate coating process is segmented into multiple deposition steps, with the shadow mask dividing the substrate into regions that receive material and regions that do not. This segmentation allows selective coating of functional layers only where needed, improving material efficiency while maintaining film quality.
2Manufacturing precision
If shadow masking is used for pattern deposition, then manufacturing precision is improved, but device complexity increases due to mask fabrication and handling
Solution Approach 1:
The patent merges the shadow mask functionality with the substrate handling system by integrating the mask into the deposition chamber architecture. The mask is positioned and secured in a way that combines multiple functions (pattern definition, substrate support, and deposition control) into a unified system, reducing operational complexity.
Solution Approach 2:
The shadow mask is pre-fabricated with the desired pattern before the deposition process. This preliminary preparation of the masking structure allows for precise pattern transfer during deposition without requiring complex real-time adjustments or adjustments during the actual coating process.
3Loss of substance
If ink jet printing is used for film deposition, then material efficiency is improved, but film purity deteriorates due to solvent residues and material degradation
Solution Approach 1:
The patent changes the physical state and processing parameters of the organic material by using thermal evaporation instead of solution-based ink jet printing. This parameter change eliminates solvent residues and prevents material degradation associated with drying processes, achieving superior film purity while maintaining pattern definition capabilities through the shadow mask.
Solution Approach 2:
The patent replaces the mechanical ink jet printing system with a vapor deposition system. This substitution eliminates the need for liquid carriers and drying processes, directly depositing pure organic material through controlled evaporation and condensation, thereby improving film purity while maintaining material efficiency through shadow mask patterning.
4Ease of operation
If conventional ink jet printing is used, then ease of operation is improved, but manufacturing precision deteriorates due to poor thickness uniformity
Solution Approach 1:
The patent applies local quality by using a shadow mask that creates spatially varying deposition rates across the substrate. This ensures uniform thickness in the patterned regions by controlling vapor access locally, while maintaining the operational simplicity of a continuous deposition process without complex printing mechanics.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves high-quality, cost-effective, large-area scalable film deposition with improved material efficiency and precision, addressing the limitations of conventional methods by maintaining a controlled environment and precise substrate alignment.
Implementation Method 1
gas bearings to support and transport substrates within a housing
Implementation Method 2
thermal jet printing of material on a substrate
Implementation Method 3
condensation of the organic vapor on the substrate
Data Source
AI summary
The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.