OLED Substrate Processing Apparatus Linear Chamber Layout

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Solution Overview

Problem

Existing substrate processing apparatuses for organic light-emitting diodes (OLEDs) are inefficient due to the need for multiple transfers of substrates between process chambers, leading to increased processing time and area requirements, especially as the number of process chambers and substrate size increase.

Innovation Solution

A substrate processing apparatus with a transferring guide and substrate supporter that moves substrates between process chambers through openings in the sidewalls, allowing for continuous processing while maintaining a vacuum state and reducing the need for gate valves between chambers, thereby minimizing processing time and area requirements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If substrates are transferred by robot arm between process chambers arranged in a circle, then substrate processing can be performed, but processing time increases and apparatus area increases

Engineering Contradiction:

Improveprocessing efficiencyVSAvoidtransfer time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The apparatus is divided into multiple process chambers (first deposition chamber, second deposition chamber, annealing chamber) that can operate independently and simultaneously. Each chamber performs a specific function, allowing parallel processing of different substrate stages without sequential transfer delays.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The substrate supporter is nested within the process chambers, allowing substrates to be loaded once and processed through multiple chambers without repeated loading/unloading. The substrate supporter acts as a carrier that holds substrates while moving through different processing environments.

Inventive Principle:

Principle #7Nested doll (Nesting)

2Productivity

If substrates are transferred by robot arm between process chambers arranged in a circle, then substrate processing can be performed, but apparatus area increases

Engineering Contradiction:

Improveprocessing capabilityVSAvoidapparatus area

Core Design Contradiction:

ProductivityVSArea of stationary object

Solution Approach 1:

The process chambers are arranged linearly rather than in a circular configuration, changing the spatial dimension from radial to linear. This linear arrangement reduces the footprint area while maintaining the capability to process substrates through multiple stages sequentially in a compact space.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Adaptability or versatility

If multiple process chambers are used, then processing capability increases, but number of transfers increases

Engineering Contradiction:

Improveprocessing capabilityVSAvoidnumber of transfers

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The substrate supporter enables continuous movement of substrates through the process chambers without stopping for loading/unloading at each stage. The system maintains continuous processing action by having substrates already positioned on the supporter before entering the first chamber and automatically transporting them through all chambers.

Inventive Principle:

Principle #20Continuity of useful action

4Reliability

If gate valves are installed between process chambers, then vacuum isolation is possible, but maintenance difficulty increases

Engineering Contradiction:

Improvevacuum isolationVSAvoidmaintenance difficulty

Core Design Contradiction:

ReliabilityVSEase of repair

Solution Approach 1:

The gate valves are completely removed from the system. Instead of using valves to isolate chambers, the patent relies on the physical separation of chambers and the ability to independently control vacuum conditions in each chamber, extracting the complex valve mechanism from the system to simplify maintenance.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient deposition processes for OLEDs by reducing processing time and area needs, allowing for continuous operation and easier maintenance of the vacuum state, even when chambers are repaired.

Implementation Method 1

a deposition material supplying member for supplying a deposition material to the substrate and disposed under the transferring guide positioned in the deposition chamber

Methodology Applied

Scientific EffectVapor deposition: Physical Vapour Deposition

Data Source

PatentUS7918940B2Apparatus for processing substrate

Publication Date: 2011.04.05 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

In a substrate processing apparatus for forming thin layers on a substrate used for an organic light emitting diode, the apparatus includes a mask attaching chamber, a deposition chamber and a mask detaching chamber. The mask attaching chamber, the deposition chamber and the mask detaching chamber are provided with a transferring guide installed thereinside, and a substrate supporter for supporting the substrate moves along the transferring guide in or between the chambers. Thus, a time for processing the substrate and an area for the apparatus may be reduced. Also, the chambers are grouped in one or more, and a gate valve is installed between the grouped chambers for opening and closing a path between the grouped chambers. Accordingly, the chambers may be continuously maintained in a vacuum state when any one of the chambers is repaired.