On-Axis Rotational Disk EUV Source with Fragment Shield
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Solution Overview
Problem
Conventional EUV light source devices with off-axis structures suffer from reduced light collection efficiency, while maintaining stable target material supply for plasma reactions.
Innovation Solution
A shield-integrated rotational disk EUV light source device with an on-axis structure, featuring a rotational disk rim, rotational disk ribs, and a fragment shield to enhance light collection efficiency by allowing EUV light to penetrate through a predetermined area and prevent target material fragments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If an off-axis structure is adopted in EUV light source device, then optical system arrangement is advantageous, but light collection efficiency is deteriorated
Solution Approach 1:
The patent inverts the conventional off-axis optical arrangement to an on-axis structure. The collector mirror is positioned on the optical axis of the laser beam, and the rotational disk is configured to rotate around this axis. This inversion allows the EUV light to be collected and focused along the same axis as the incident laser beam, significantly improving light collection efficiency while maintaining practical optical system arrangement
Solution Approach 2:
The patent introduces a new spatial dimension by positioning the rotational disk rim at a specific distance from the laser source along the optical axis, and configuring the collector mirror to receive EUV light from this axial position. This dimensional arrangement allows simultaneous optimization of both optical system compactness and light collection efficiency, resolving the contradiction between operational ease and energy loss
2Reliability
If rotational disk structure is used to supply target materials, then stable plasma reaction is achieved, but light collection efficiency is reduced due to off-axis configuration
Solution Approach 1:
The patent merges the target material supply function with the light collection function by integrating the rotational disk structure into the on-axis optical system. The rotational disk rim serves dual purposes: supplying target materials for stable plasma reactions and positioning the EUV light source at the optical axis for efficient collection. The rotational disk ribs are designed to allow EUV light penetration while maintaining structural integrity for reliable target material delivery
Solution Approach 2:
The rotational disk structure is designed with multi-functionality: it supplies target materials continuously for stable plasma reactions, positions the EUV light source on the optical axis for efficient collection, and its ribs provide both structural support and light transmission pathways. This universal design resolves the contradiction by making the same structure serve multiple functions simultaneously
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device significantly enhances light collection efficiency by maintaining a stable target material supply and preventing fragment scattering, achieving stable EUV light generation.
Implementation Method 1
required plasma, often referred to as laser-produced plasma (LPP), can be produced by irradiating a target material containing line-emitting elements required as a laser beam
Implementation Method 2
a rotational disk rim which melts a target material for generating EUV light through plasma reactions
Implementation Method 3
receives the EUV light reflected from the target material
Implementation Method 4
collects the EUV light to the same incident light axis
Data Source
AI summary
The present invention relates to a shield-integrated rotational disk EUV light source device including a fragment shield, including: a rotational disk having a rotational disk rim which melts a target material for generating EUV light through plasma reactions; a plurality of rotational disk ribs supporting the rotational disk rim so that EUV light penetrates relative to a predetermined area among a light focusing region; and a fragment shield surrounding a plasma reaction region of the rotational disk rim to prevent the generation of target material fragments when the target material melted on the rotational disk rim causes a plasma reaction by the beam emitted from the laser source.