On-Chip Alkali Dispenser with Monolithic Trench and Getter

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional alkali dispensers for atomic sensors are either incompatible with batch fabrication, have variability, or require large current and increased size, leading to inefficiencies and reduced lifetime in miniaturized devices.

Innovation Solution

An on-chip alkali dispenser is developed using a monolithic semiconductor substrate with a trench containing an evaporable metal material and a heating element, integrated with a getter material to control vapor pressure and reduce size and power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If a conventional passive source is used, then the device can be made small (∼mm size), but the fabrication process becomes complex and variability increases

Engineering Contradiction:
Improvedevice sizeVSAvoidfabrication process
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The patent merges the alkali metal source, heating element, and vaporization chamber into a single integrated microfabricated device. The evaporable metal material is deposited directly onto the heating element within a sealed cavity, eliminating the need for separate components and complex assembly processes while maintaining miniaturized dimensions.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The heating element serves multiple functions: it heats the evaporable metal material to generate vapor, acts as a barrier to prevent metal depletion, and forms part of the sealed cavity structure. This multi-functionality simplifies the overall device architecture and reduces the number of separate components needed.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If a conventional active source is used, then the alkali vapor pressure can be controlled, but the device size increases and power consumption increases

Engineering Contradiction:
Improvevapor pressure controlVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent controls vapor pressure by precisely controlling the temperature parameter of the heating element. By adjusting the heating power to maintain specific temperature levels, the system achieves reliable vapor pressure control without requiring complex active regulation mechanisms or increased device size.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a simplified model where the heating element's temperature directly determines vapor pressure, eliminating the need for complex feedback control systems. This approach achieves reliable vapor pressure control through straightforward thermal management rather than complex active regulation.

Inventive Principle:
Principle #26Copying

3Reliability

If a conventional active source is used, then the alkali vapor pressure can be controlled, but the current requirement increases

Engineering Contradiction:
Improvevapor pressure controlVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent optimizes power consumption by carefully selecting the heating element material properties and cavity geometry to achieve efficient vaporization at lower temperatures. This reduces the electrical power required compared to conventional active sources while maintaining reliable vapor pressure control.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures combining the evaporable metal material with the heating element and cavity walls. This composite approach improves thermal efficiency and reduces the power required for vaporization while maintaining stable vapor pressure through the synergistic properties of the material combination.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient, miniaturized, and long-lasting alkali dispensers with reduced power consumption, allowing for heterogeneous integration with other components and improved performance in atomic sensors.

Implementation Method 1

An alkali dispenser can be configured to heat the evaporable metal material in order to release the metal atoms therefrom to create the metal atom vapor

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

a getter material disposed to sorb unwanted materials released from the evaporable metal material

Methodology Applied
Scientific EffectSorption: Sorption

Data Source

PatentEP2629159B1ON-CHIP ALKALI DISPENSER and METHOD FOR FABRICATING THE SAME
Publication Date: 2019.05.22 HONEYWELL INTERNATIONAL INC
  • EP2629159B1 patent drawingFigure 1~2A
  • EP2629159B1 patent drawingFigure 2B~2C

AI summary

Embodiments described herein provide for an on-chip alkali dispenser. The on-chip alkali dispenser includes a monolithic semiconductor substrate defining a trench therein, and an evaporable metal material disposed in the trench. A heating element is disposed proximate the evaporable metal material and configured to provide heat to the evaporable metal material. A getter material is disposed to sorb unwanted materials released from the evaporable metal material.