On-Chip Antenna Structures for High-Frequency Chip Communication

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Solution Overview

Problem

As semiconductor chips miniaturize and packaging density increases, conventional wiring techniques face limitations due to inductive, resistive, and capacitive delays, impairing circuit performance, especially at high clock frequencies, and require more efficient communication methods between closely spaced chips.

Innovation Solution

The use of microbumps, redistribution layers (RDLs), and structures like TSVs, copper pillars, and inter-metal layers to form various types of antennas such as patch, dipole, spiral, and slot antennas on-chip, reducing inductive, resistive, and capacitive delays and enhancing RF signal communication.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional wiring techniques are used for communication between chips, then circuit performance is maintained at lower frequencies, but inductive, resistive and capacitive delays significantly impair performance at high clock frequencies in the GHz range

Engineering Contradiction:
Improveclock frequencyVSAvoidcircuit performance
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent replaces conventional mechanical/electrical wiring techniques with electromagnetic radiation-based communication. Antennas are integrated directly onto the semiconductor chip to transmit and receive RF signals, substituting the physical conductor-based signal transmission with wireless electromagnetic communication, thereby eliminating inductive, resistive and capacitive delays associated with conventional wiring at high frequencies

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent transitions from planar two-dimensional wiring layouts to three-dimensional antenna structures. By incorporating vertical elements such as patch antennas with ground planes and elevated conductive structures, the design utilizes the third dimension (height above the chip surface) to create effective radiating elements that overcome the limitations of flat, two-dimensional circuit traces

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If semiconductor chips are miniaturized to increase device speed and circuit density, then device speed and circuit density increase, but the area available for communications conductors becomes increasingly limited

Engineering Contradiction:
Improvecircuit densityVSAvoidarea for communications conductors
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The patent utilizes three-dimensional antenna structures that extend vertically from the chip surface, employing patch antennas with ground planes separated by dielectric layers. This vertical dimension allows effective antenna operation with minimal planar footprint, enabling RF communication functionality without consuming excessive lateral space on miniaturized chips

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent integrates antenna structures directly with the semiconductor chip fabrication process, combining RF communication functionality with the existing chip architecture. Conductive layers used for chip interconnection are simultaneously configured to form antenna elements, merging communication functions with the chip's existing structural components

Inventive Principle:
Principle #5Merging (Combining)

3Ease of operation

If conventional bond-wires and microbumps are used for connections, then chip-to-chip communication is enabled, but inductive, resistive and capacitive delays significantly impair circuit performance at high frequencies

Engineering Contradiction:
Improvechip communicationVSAvoidsignal transmission quality
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent replaces mechanical connection methods (bond-wires and microbumps) with integrated on-chip antenna structures. Instead of relying on physical connectors that introduce parasitic inductance, resistance and capacitance, the design uses electromagnetic radiation from compact antenna elements to transmit signals, eliminating the need for extended conductive paths and their associated losses at high frequencies

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables effective communication between semiconductor chips by reducing delays and increasing communication efficiency, supporting higher frequencies and complex operations within advanced electronic devices.

Implementation Method 1

one or more metallic structures formed by through-silicon vias (TSVs), microbumps, copper pillars, or redistribution layers with or without inter-metal layers in the upper or lower chips can form various types of antennas such as patch, dipole, spiral, slot, and the like on-chip

Methodology Applied
Scientific EffectElectromagnetic radiation: Electromagnetic Induction

Data Source

PatentUS9431714B2Antenna structures
Publication Date: 2016.08.30 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US9431714B2 patent drawing
  • US9431714B2 patent drawing
  • US9431714B2 patent drawing

AI summary

An antenna formed on a semiconductor structure having a substrate with electrical circuits thereon operationally related to the functionality of an antenna and one or more metallic structures formed by a through silicon via, microbump, copper pillar, or redistribution layer proximate to the substrate. The one or more metallic structures form a radiating element of the antenna. Exemplary antennas thus formed can include a slot antenna, a WLAN slot antenna, a planar invented F antenna (PIFA), a spiral antenna, a dipole antenna, a Yagi antenna, a planar dipole antenna, a vertical dipole antenna, a patch antenna, a helical antenna, a loop patch antenna, and combinations thereof.