Semiconductor Device Testing for On-Chip RTN Detection

Solution Overview

Problem

Existing noise detection techniques for semiconductor devices, such as those experiencing Random Telegraph Noise (RTN), are inefficient due to reliance on statistical histograms and complex algorithms, requiring large storage and computational resources, and are not suitable for on-chip implementation.

Innovation Solution

A noise detection system that uses less complex comparison approaches to analyze measurement results, dynamically updating boundary values and reducing storage requirements, allowing for rapid detection of RTN by comparing measurement results with predefined thresholds and generating a map of affected devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If statistical histograms and complex algorithms are used for noise detection, then measurement precision is improved, but device complexity increases and storage requirements increase

Engineering Contradiction:

Improvenoise detection accuracyVSAvoiddetection system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts only the essential boundary values (maximum and minimum) from the complete measurement dataset, discarding the need to process and store entire statistical histograms. This extraction approach maintains noise detection capability while dramatically reducing computational complexity and storage requirements.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of using complex statistical algorithms to detect noise, the patent inverts the approach by using simple comparison operations against boundary values. The detection logic is simplified from complex pattern recognition to straightforward threshold comparison, maintaining precision while reducing complexity.

Inventive Principle:

Principle #13The other way round (Inversion)

2Measurement precision

If statistical histograms and complex algorithms are used for noise detection, then measurement precision is improved, but storage requirements increase

Engineering Contradiction:

Improvenoise detection accuracyVSAvoidstorage requirements

Core Design Contradiction:

Measurement precisionVSQuantity of substance

Solution Approach 1:

The patent extracts only the essential boundary values (maximum and minimum) from the complete measurement dataset, discarding the need to process and store entire statistical histograms. This extraction approach maintains noise detection capability while dramatically reducing computational complexity and storage requirements.

Inventive Principle:

Principle #2Taking out (Extraction)

3Measurement precision

If complex algorithms are used for noise detection, then measurement precision is improved, but analysis time increases

Engineering Contradiction:

Improvenoise detection accuracyVSAvoidanalysis time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

Instead of using complex statistical algorithms to detect noise, the patent inverts the approach by using simple comparison operations against boundary values. The detection logic is simplified from complex pattern recognition to straightforward threshold comparison, maintaining precision while reducing complexity.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent skips the time-consuming steps of statistical histogram generation and complex algorithmic processing. By directly comparing measurement results against pre-established boundary values, the system rushes through the detection process efficiently, maintaining accuracy while minimizing analysis time.

Inventive Principle:

Principle #21Skipping (Rushing through)

Data Source

PatentUS12405300B2Systems and method to test semiconductor devices

Publication Date: 2025.09.02 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A method for testing semiconductor devices is disclosed, which includes: obtaining a result measured on a semiconductor device in one of a set of tests; comparing the result with a maximum value determined among respective results that were previously measured in one or more of the set of tests and a minimum value determined among respective results that were previously measured in one or more of the set of tests; determining, based on the comparison between the first result and the maximum and minimum values, whether to update the maximum and minimum values to calculate a delta value; comparing the delta value with a noise threshold value; determining based on the comparison between the delta value and the noise threshold value, whether to update a value of a timer; determining that the value of the timer satisfies a timer threshold; and determining that the semiconductor device incurs noise.