On-Chip Miniature X-Ray Source With Fast Cold-Cathode Switching
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Solution Overview
Problem
Conventional miniature X-ray sources face challenges such as large size, high power consumption, long switching response time, and high production costs, limiting their application in portable and dynamic imaging scenarios.
Innovation Solution
An on-chip miniature X-ray source is developed using a micro-fabrication process, featuring an on-chip miniature electron source with a resistive-switching material film layer, interdigital electrode pairs, and a hollow cavity structure, which reduces size and manufacturing costs while providing stable X-ray emission and fast switching response.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If conventional thermionic emission cathode is used, then X-ray generation is achieved, but the device has large volume, high power consumption and long switching delay time
Solution Approach 1:
The patent replaces the conventional thermionic emission cathode with a cold cathode based on field emission technology. This substitution eliminates the need for thermal heating mechanisms, thereby dramatically reducing the device volume, lowering power consumption, and achieving ultra-fast switching response times in the microsecond range, directly resolving the technical contradiction between volume and switching delay time
Solution Approach 2:
The patent changes the operational parameters of the electron source by transitioning from thermionic emission (requiring high temperatures) to field emission (operating at room temperature). This parameter change enables miniaturization of the device while achieving fast switching response, simultaneously addressing both the volume reduction and switching speed requirements
2Volume of moving object
If nanomaterial field emission electron source is used, then size is reduced and switching response time is shortened, but manufacturing cost increases
Solution Approach 1:
The patent segments the complex nanomaterial field emission structure into a simplified planar electrode configuration with controlled gap geometry. This segmentation approach maintains the fast switching and compact size benefits while using conventional semiconductor fabrication techniques to reduce manufacturing complexity and cost
Solution Approach 2:
The patent employs a planar electrode structure that can be fabricated using standard semiconductor processes, replacing expensive and complex nanomaterial assemblies. This approach uses readily available materials and conventional manufacturing methods, significantly reducing production costs while maintaining the compact form factor and fast response characteristics
3Ease of manufacture
If micro-fabrication process is used, then manufacturing cost is reduced and batch production is enabled, but device complexity increases
Solution Approach 1:
The patent designs a planar electrode structure that serves multiple functions: it defines the emission gap, provides electrical isolation through integrated insulating layers, and enables batch fabrication using standard semiconductor processes. This multi-functional design reduces device complexity by consolidating multiple components into a single planar structure that can be manufactured using conventional techniques
Solution Approach 2:
The patent merges the electron emission gap definition, electrical isolation, and structural support functions into a single integrated planar electrode design. By combining these functions that would traditionally require separate components, the device complexity is reduced while enabling cost-effective batch production through standard micro-fabrication processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The on-chip miniature X-ray source achieves reduced size and cost, stable X-ray dose, low vacuum requirements, and fast switch response, enabling applications in portable and dynamic imaging equipment.
Implementation Method 1
a tunnel junction is formed in a region of the resistive-switching material film layer under the gap
Implementation Method 2
a resistive-switching material film layer covering a surface of the substrate
Implementation Method 3
the miniature X-ray source based on the nanomaterial (such as carbon nanotubes and zinc oxide nanowires) field emission electron source
Implementation Method 4
Electrons are accelerated after being emitted from the thermionic cathode, and such high-energy electrons bombard the anode, causing a bremsstrahlung radiation
Data Source
AI summary
Provided are an on-chip miniature X-ray source and a method for manufacturing the same. The on-chip miniature X-ray source includes: an on-chip miniature electron source; a first insulating spacer provided on an electron-emitting side of the on-chip miniature electron source, where the first insulating spacer has a cavity structure; and an anode provided on the first insulating spacer, where a closed vacuum cavity is formed between the on-chip miniature electron source and the anode. The on-chip miniature X-ray source has the advantages of stable X-ray dose, low working requirements for vacuum, fast switch response, capability of integration and batch fabrication, and can be used in various types of small and portable X-ray detection, analysis and treatment devices.