Online Sample Transfer System for ICP Analysis
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Solution Overview
Problem
Conventional analysis systems for trace metal analysis in semiconductor manufacturing and environmental monitoring face challenges such as delayed feedback due to offline sample analysis, limited installation of ICP/MP analysis apparatuses, sample contamination, and the 'memory effect' from dead volume components, which lead to inaccurate results and increased costs.
Innovation Solution
An analysis system that online transfers atomized samples in a fog state to a common plasma torch, eliminating the use of pumps and valves to minimize mixing and contamination, using individually transferring units with nebulizers, spray chambers, and makeup gas supply paths to prevent sample interaction and contamination, and includes a drain flow path to direct unused samples away from the plasma torch.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If one analysis apparatus is installed at each sampling site, then analysis accuracy is improved, but system cost and installation complexity increase significantly
Solution Approach 1:
The patent merges multiple sample transfer paths into a single shared analysis apparatus. The sample transfer unit collects samples from multiple sites and transfers them sequentially to one analysis apparatus, eliminating the need for multiple separate analysis systems while maintaining analysis accuracy through proper sample handling and transfer mechanisms.
Solution Approach 2:
The analysis apparatus is designed to handle multiple sample types from different sites through a universal sample transfer unit. The system can switch between different sample sources and transfer them to the same analysis apparatus, making the apparatus multi-functional and reducing overall system complexity.
2Device complexity
If sample transfer paths are shared between multiple sites, then system cost is reduced, but sample contamination and mixing increase
Solution Approach 1:
The sample transfer path is segmented into separate transfer paths for each sampling site, with each path having its own transfer mechanism. The paths converge at the analysis apparatus but maintain separation during transfer, preventing sample mixing while allowing shared analysis resources.
Solution Approach 2:
The sample transfer unit acts as an intermediary between multiple sampling sites and the analysis apparatus. It includes individual transfer paths for each site that can be independently controlled, allowing samples to be transferred sequentially without direct contact between different sample streams, thus preventing contamination.
3Ease of operation
If pumps and valves are used in sample transfer paths, then sample transfer control is improved, but memory effect and sample mixing increase
Solution Approach 1:
The patent extracts and removes pumps and valves from the sample transfer paths to eliminate dead volume components that cause memory effects. Instead, the system uses gravity-driven or pressure-driven flow mechanisms that maintain continuous sample flow without stagnation points, thereby preventing sample mixing while still achieving adequate transfer control.
Solution Approach 2:
The sample transfer system is designed to be self-regulating, using principles such as gravity flow, pressure differentials, or capillary action to move samples without mechanical pumps or valves. This self-service approach eliminates components with dead volume while maintaining functional sample transfer capabilities.
4Measurement precision
If analysis is performed offline at laboratory, then analysis precision is maintained, but feedback time and productivity decrease
Solution Approach 1:
The system implements continuous sample collection and transfer from multiple sites to the analysis apparatus, eliminating the batch processing delays of offline laboratory analysis. Samples are continuously transferred and analyzed in sequence, providing ongoing feedback while maintaining analytical precision through the controlled transfer process.
Solution Approach 2:
Samples are collected and prepared for transfer in advance through the sample transfer unit, which maintains sample integrity during transit. This preliminary action of organized sample collection and continuous transfer enables faster turnaround time without compromising the precision that would normally require controlled laboratory conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables prompt and accurate analysis of multiple samples from different sites with a single analysis apparatus, reducing the 'memory effect' and sample loss, and providing efficient online transfer over long distances with minimal contamination, thus improving feedback speed and analysis precision.
Implementation Method 1
atomizes a sample solution S in a liquid state with a nebulizer N
Implementation Method 2
traps fog having a large particle diameter in a spray chamber C, introduces only an analysis sample having a small particle diameter
Implementation Method 3
ICP analysis apparatus, such as an inductively-coupled plasma mass spectrometry apparatus
Implementation Method 4
analysis apparatus with microwave plasma (MP)
Data Source
Figure 1~2
Figure 3(a)~3(b)
AI summary
The present invention relates to an analysis system capable of online transferring an analysis sample and promptly acquiring an analysis result. The analysis system capable of analyzing the analysis samples supplied from at least two sites, with one analysis apparatus, and requiring no cleaning process for a nebulizer and a spray chamber, is provided. The present invention relates to analysis system including at least two sample individually transferring units. Each sample transferring path of the sample individually transferring units is coupled to a plasma torch of a common analysis unit including the one analysis apparatus with inductively-coupled plasma or microwave plasma. Each sample transferring path has a main flow path, a makeup gas supply path, and a drain flow path. The plasma torch has a sample introducing pipe that introduces the atomized analysis sample, provided at a substantially center. The inner diameter of the drain flow path is equivalent to or larger than the inner diameter of an inlet portion of the sample introducing pipe of the plasma torch.