Optical Phased Array Chip Calibration via Reversed Laser Injection

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Solution Overview

Problem

Existing calibration systems for optical phased array (OPA) chips suffer from low standardization and automation, leading to inefficient and non-universal testing methods that are limited by the tradeoff between refresh rate, field of view, and angular resolution, especially when evaluating high-channel count OPAs.

Innovation Solution

A calibration system utilizing reversed injection of collimated laser for OPA chips, combined with phase-shift adjustments and automated modules for precise alignment and power measurement, enabling high-throughput wafer-level and batch calibration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If free space beam quality evaluation is used with SWIR camera, then beam quality can be evaluated, but refresh rate is limited and throughput is low

Engineering Contradiction:
Improvebeam quality evaluationVSAvoidrefresh rate
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent replaces the mechanical/imaging-based SWIR camera system with an electrical measurement system. Instead of using optical imaging to evaluate beam quality, the invention uses electrical signals to directly measure and characterize the optical field, enabling much faster measurement speeds that are not limited by camera refresh rates.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an intermediary measurement approach that uses electrical signals as a mediator between the optical field and the measurement system. By converting optical field characteristics into electrical measurements, the system achieves high-speed characterization without the bottlenecks of direct optical imaging.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If Fourier optical imaging system is used, then far field pattern can be mapped, but field of view and angular resolution have tradeoff limitations

Engineering Contradiction:
Improvefar field pattern mappingVSAvoidfield of view and angular resolution
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent moves the measurement from the spatial domain (optical imaging) to the electrical signal domain. By measuring optical field characteristics through electrical means rather than optical imaging, the system avoids the inherent tradeoffs between field of view and angular resolution that constrain Fourier optical imaging systems.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If customized test configurations are used for verification, then individual claims can be validated, but standardization and automation are low

Engineering Contradiction:
Improveverification accuracyVSAvoidtest automation
Core Design Contradiction:
ReliabilityVSExtent of automation

Solution Approach 1:

The patent creates a universal electrical measurement system that can validate multiple individual claims and test configurations through a single standardized interface. The electrical measurement approach provides a multi-functional platform that maintains verification accuracy while enabling automated testing across different OPA chip designs and configurations.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Ease of operation

If on-chip optical field control and free space beam quality evaluation are combined, then calibration can be performed, but system complexity increases

Engineering Contradiction:
Improvecalibration capabilityVSAvoidsystem complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent extracts the beam quality evaluation function from the physical optical path and relocates it to an electrical measurement domain. By separating the measurement function from the optical propagation path, the system reduces complexity while maintaining calibration capability.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves efficient, automated, and flexible calibration of OPA chips, maximizing throughput and minimizing distortion, suitable for various aperture sizes and scales, with reduced reliance on high-performance SWIR cameras.

Implementation Method 1

The calibration methods for OPA chips comprises the steps of: reversely injecting collimated laser to an OPA chip under calibration to perform coherent beam combination on the collimated laser within the OPA chip

Methodology Applied
Scientific EffectOptical reciprocity:

Implementation Method 2

reversely injecting collimated laser to an OPA chip under calibration to perform coherent beam combination on the collimated laser within the OPA chip

Methodology Applied
Scientific EffectCoherent beam combination:

Implementation Method 3

each of the phase shifters comprises a tunable waveguide section with electric connections and an optical field control mechanism

Methodology Applied
Scientific EffectPhase modulation: Phase Modulation

Implementation Method 4

an optical field control mechanism including but not limited to the thermo-optical effect, the free carrier plasma dispersion effect, the piezoelectric effect, and the electro-optic effect

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Data Source

PatentUS12487336B2Calibration system and method for integrated optical phased array chip
Publication Date: 2025.12.02 SHANGHAI JIAOTONG UNIV
  • US12487336B2 patent drawing
  • US12487336B2 patent drawing
  • US12487336B2 patent drawing

AI summary

A calibration system and related methods for optical phased array chips. The calibration system includes an adjustable mount module, an infrared microscopic observation module, an arrayed driver module, a two-dimensional laser beam scanning module, a photoelectric conversion module and an upper computer, and utilizes computer-vision-enabled positioning and phase error compensation algorithms as software components. Collimated laser is emitted from the target beamforming angle and aimed at the emission aperture of the chip, and is subsequently sampled by the array elements in a reversed injection manner. Based on the reciprocity of light propagation, by maximizing the power reversely output from the bus waveguide of the optical phased array chip, beamforming at the target angle is achieved supported by software implementations of optimization algorithms. The system and related methods are readily achievable, highly automated, and offers fast and batch calibration with relatively low expenses, good flexibility and long-term compatibility.