Opaque Quartz Glass Bubble Control

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Solution Overview

Problem

Existing methods for manufacturing opaque quartz glass ingots with spherical bubbles face challenges in achieving a balance between mechanical strength, surface roughness, and light reflectance, with amorphous bubble methods resulting in low mechanical strength and high surface roughness, while spherical bubble methods struggle with large size limitations and uneven surfaces.

Innovation Solution

Control the mean diameter of bubbles in opaque quartz glass to be less than 1 μm, using a manufacturing process involving silica powder slurry wet pulverization, spray dry granulation, and press-molding to achieve a density of 2.16 to 2.19 g/cm3, whiteness of 90% or more, and bending strength of 75 MPa or more, with surface roughness Ra of 0.5 μm or less.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If amorphous bubble manufacturing method is used, then average particle size of bubbles is reduced and baked surface smoothness is improved, but mechanical strength is lowered due to stress concentration at bubble edges

Engineering Contradiction:
Improvebaked surface smoothnessVSAvoidmechanical strength
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The patent transforms the bubble shape from amorphous (irregular) to spherical, eliminating corners and edges where stress would concentrate. The spherical bubbles are formed by controlling the silica powder particle size distribution and firing conditions, creating a curved surface that distributes stress uniformly throughout the structure, thereby maintaining surface smoothness while significantly improving mechanical strength.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Strength

If spherical bubble manufacturing method is used, then mechanical strength is improved due to no stress concentration, but average bubble diameter cannot be reduced and baked surface becomes rough

Engineering Contradiction:
Improvemechanical strengthVSAvoidbaked surface smoothness
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The patent changes the particle size parameters of the silica powder used in the slurry, specifically controlling the average particle size to 2-8 μm and standard deviation to 3-7 μm. This parameter control during the slurry preparation stage enables formation of uniform spherical bubbles with controlled diameter (0.1-1.0 μm) while maintaining surface smoothness, resolving the contradiction between strength and surface quality.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent performs preliminary classification and size control of silica powder particles before slurry formation. By pre-sorting the powder particles into a specific size range (2-8 μm average, 3-7 μm standard deviation), the foundation is set for forming uniform spherical bubbles during firing, preventing surface roughness and controlling bubble diameter from the outset.

Inventive Principle:
Principle #10Preliminary action

3Volume of stationary object

If large sized opaque quartz glass ingot is manufactured, then application range is expanded, but bubble diameter increases reducing whiteness and reflectance

Engineering Contradiction:
Improveingot sizeVSAvoidwhiteness and reflectance
Core Design Contradiction:
Volume of stationary objectVSIllumination intensity

Solution Approach 1:

The patent maintains the critical parameter of small bubble diameter (0.1-1.0 μm) even in large sized ingots by controlling the silica powder particle size distribution (2-8 μm average, 3-7 μm standard deviation) and optimizing firing conditions. This parameter control ensures that regardless of ingot size, the bubbles remain small enough to maintain high whiteness (90% or more) and light reflectance (85% or more), enabling large sized ingots for semiconductor equipment without sacrificing optical properties.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The resulting opaque quartz glass exhibits enhanced heat ray blocking, light blocking properties, and improved mechanical strength, making it suitable for semiconductor manufacturing and optical applications with a smooth, high-quality surface.

Implementation Method 1

a silica powder slurry having silica powder concentration of 45 to 75 wt % is subjected to wet pulverization by applying one or a combination of two or more methods selected from beads mill pulverization, ball mill pulverization, vibration mill pulverization and attritor pulverization

Methodology Applied
Scientific EffectMechanical force: Mechanical Force

Implementation Method 2

the slurry is subjected to spray dry granulation for forming substantially spherical granulated silica particles

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 3

the slurry is subjected to spray dry granulation for forming substantially spherical granulated silica particles

Methodology Applied
Scientific EffectCoagulation: Coagulation

Implementation Method 4

the prepared slurry is subjected to spray drying to obtain granulated silica particles and the granulated silica particles are press-molded and fired

Methodology Applied
Scientific EffectSintering: Sintering

Implementation Method 5

the granulated silica particles are press-molded and fired

Methodology Applied
Scientific EffectHeating: Heating

Data Source

PatentUS12006242B2Opaque quartz glass and method of manufacturing the same
Publication Date: 2024.06.11 TOSOH QUARTZ

AI summary

A large sized opaque quartz glass ingot having an excellent heat ray shielding property, an outstanding light blocking property, high mechanical strength and small roughness of a baked finished smooth surface.The shape of bubbles inside the quartz glass are almost complete spheres and the average particle size of the bubbles is 1 μm or less, such that the strength of the opaque quartz glass ingot is increased as the stress concentration at the edges of the bubbles is eliminated and an increase of surface roughness caused by baking is alleviated.