Opaque Quartz Chamber Ceiling for Seal-Safe Substrate Heating
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Solution Overview
Problem
Heat rays reflected from substrates during heating can deteriorate the seal at the top of the process container in existing substrate processing apparatuses, leading to a loss of airtightness and potential damage to components.
Innovation Solution
A substrate processing apparatus is designed with a process container having a ceiling made of opaque quartz to suppress the transmission of heat rays reflected from the substrate, combined with a transparent quartz sheet and O-ring for maintaining airtightness between the container and the heater, preventing heat from reaching the seal and maintaining the integrity of the seal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a lamp heater is provided on top of the process container to heat the substrate, then heating efficiency is improved, but heat rays reflected from the substrate can reach and deteriorate the seal
Solution Approach 1:
A reflective shield is introduced as an intermediary component between the substrate and the seal structure. This shield intercepts heat rays reflected from the substrate and redirects them away from the seal, preventing thermal damage while preserving the heating function of the lamp heater
Solution Approach 2:
The reflective shield captures harmful reflected heat rays and redirects them to heat other regions of the process container that require thermal treatment. This converts the harmful reflected energy into a beneficial heating source for additional process zones
2Reliability
If the process container ceiling is made of opaque quartz to block heat rays, then seal protection is improved, but heat transfer efficiency may be reduced
Solution Approach 1:
The process container ceiling is constructed with spatially varying optical properties: opaque quartz is used in regions where heat ray blocking is needed to protect the seal, while transparent or transmissive materials are used in regions where heat transfer to the substrate is required. This local differentiation resolves the contradiction between protection and efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses the deterioration of the seal by preventing heat rays from reaching the seal, maintaining the airtightness and reducing the risk of damage, while allowing efficient heat transfer and plasma generation.
Implementation Method 1
at least a portion of the process container, which is located adjacent to the heater, is made of opaque quartz; transmission of heat rays reflected from the substrate to the sealer is suppressed by the at least a portion of the process container
Implementation Method 2
a heater located above the mounting table and configured to radiate heat rays toward the substrate mounted on the mounting table to heat the substrate
Implementation Method 3
airtightness between the process container and the heater is maintained by a seal
Data Source
AI summary
There is provided a technique that includes: a mounting table configured to be capable of mounting a substrate on the mounting table; a heater located above the mounting table and configured to radiate heat rays toward the substrate mounted on the mounting table to heat the substrate; a process container disposed below the heater and configured to accommodate the mounting table, wherein at least a portion of the process container, which is located adjacent to the heater, is made of opaque quartz; and a sealer configured such that transmission of heat rays reflected from the substrate to the sealer is suppressed by the at least a portion of the process container and airtightness between the process container and the heater is maintained by a seal.