Open-Gate PC-HEMT for Normally-Off Operation

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Solution Overview

Problem

Existing high-electron-mobility transistors (HEMTs) based on III-V semiconductor materials face challenges in achieving 'normally-off' operation mode while maintaining high device turn-on performance, leading to increased power consumption and circuit complexity.

Innovation Solution

The development of an open-gate pseudo-conductive high-electron mobility transistor (PC-HEMT) with a multilayer hetero-junction structure, featuring a specific thickness and surface roughness of the top layer in the open gate area, allowing for capacitive coupling and enabling a pseudo-conducting current range between normally-on and normally-off operation modes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If conventional HEMT structures with negative threshold voltage are used, then normally-on operation mode is achieved, but power consumption increases and circuit complexity increases

Engineering Contradiction:
Improveoperation modeVSAvoidpower consumption
Core Design Contradiction:
Ease of operationVSUse of energy by moving object

Solution Approach 1:

The patent applies parameter changes by precisely controlling the thickness of the AlGaN barrier layer (5-9 nm) and the surface roughness (0.2 nm or less) to transform the transistor from normally-on to normally-off operation mode. This parameter optimization enables the device to operate without requiring negative gate voltage, thereby reducing power consumption while maintaining ease of operation.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements local quality by creating a specific surface roughness profile (0.2 nm or less) in the open gate area and controlling the barrier layer thickness locally. This localized structural optimization enables pseudo-conductive behavior that achieves normally-off operation without affecting the overall device structure, thus reducing power consumption while maintaining operational simplicity.

Inventive Principle:
Principle #3Local quality

2Ease of operation

If conventional HEMT structures with negative threshold voltage are used, then normally-on operation mode is achieved, but drive circuit complexity increases

Engineering Contradiction:
Improveoperation modeVSAvoidcircuit complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

By optimizing the barrier layer thickness (5-9 nm) and surface roughness (0.2 nm or less), the patent achieves normally-off operation mode that eliminates the need for complex negative voltage generation circuits. This parameter control simplifies the drive circuitry while maintaining ease of operation.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent inverts the conventional approach by designing the HEMT to be normally-off rather than normally-on. This inversion eliminates the need for active biasing circuits and negative voltage generators, thereby reducing drive circuit complexity while preserving operational ease.

Inventive Principle:
Principle #13The other way round (Inversion)

3Ease of manufacture

If the top layer thickness is not optimized, then manufacturing is simpler, but sensitivity is reduced

Engineering Contradiction:
Improvelayer thickness controlVSAvoidsensitivity
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent establishes specific parameter ranges for the top layer thickness (5-9 nm) and surface roughness (0.2 nm or less) that optimize both manufacturability and sensitivity. These parameter specifications enable standard semiconductor fabrication processes to achieve the required precision while maximizing device sensitivity for high-voltage and high-power sensing applications.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces power consumption, simplifies drive circuits, and enhances sensitivity, enabling efficient operation and ultrasensitive sensing capabilities in high-voltage and high-power applications.

Implementation Method 1

a conducting channel comprising a two-dimensional electron gas (2DEG), formed at the interface between said buffer layer and said barrier layer and providing electron current in said transistor between source and drain electrodes

Methodology Applied
Scientific EffectElectron flow: Conduction (electrical)

Implementation Method 2

an open gate area between said source and drain contacts; wherein: (i) the thickness of a top layer (barrier or buffer) of said structure in said open gate area is 5-9 nm which corresponds to the pseudo-conducting current range between normally-on and normally-off operation mode of the transistor

Methodology Applied
Scientific EffectCapacitive coupling: Capacitance

Data Source

PatentUS10905346B2Pseudo-conductive high-electron mobility transistors and microelectronic sensors based on them
Publication Date: 2021.02.02 EPITRONIC HLDG PTE LTD
  • US10905346B2 patent drawing
  • US10905346B2 patent drawing
  • US10905346B2 patent drawing

AI summary

In some embodiments, an open-gate pseudo-conductive high-electron mobility transistor (PC-HEMT) includes a multilayer hetero-junction structure made of III-V single-crystalline or polycrystalline semiconductor materials. This structure includes at least one buffer layer and a barrier layer, and is deposited on a substrate layer. The PC-HEMT further includes a two-dimensional electron gas (2DEG) or two-dimensional hole gas (2DHG) conducting channel formed at the interface between the buffer layer and the barrier layer, source and drain contacts, either ohmic or non-ohmic, connected to the 2DEG or 2DHG conducting channel, electrical metallizations for connecting the PC-HEMT to an electric circuit, and an open gate area between the source and drain contacts. Some embodiments use non-ohmic contacts, have thickness of the top (buffer or barrier) layer in the open gate area in the range of 5-9 nm, which corresponds to the pseudo-conducting current range between normally-on and normally-off operation mode of the transistor, and have the roughness of the surface barrier layer in the range of about 0.2 nm or less.