Optical Alignment Marking for Large-Area Microstructure Manufacturing

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Solution Overview

Problem

Existing optical manufacturing systems face challenges in producing large-scale three-dimensional patterns on surfaces that exceed the field-of-view of the optical system, particularly when attempting to create micro-structured patterns like aerodynamic riblets on aircraft or turbine components, as expanding the field-of-view with optical components complicates the process.

Innovation Solution

The method involves generating alignment marks on a surface using one or more optical processing systems, with each set of marks serving as a reference for the next, allowing the systems to accurately position and orient themselves across larger areas, enabling the creation of micro-structured patterns across multiple regions without the need for extensive realignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If the field-of-view is expanded using optical components such as lenses and telescopes, then the processing area is increased, but the ability to produce micro-structured patterns deteriorates

Engineering Contradiction:
Improveprocessing areaVSAvoidmicro-structured pattern quality
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent divides the large surface into multiple smaller regions, each processed separately by the optical system. Alignment marks are generated in each region to facilitate precise positioning. This segmentation allows the optical system to maintain its field-of-view limits while still processing large surfaces by working in manageable sections with high precision in each section.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If the field-of-view is expanded using optical components, then the processing area is increased, but the device complexity increases

Engineering Contradiction:
Improveprocessing areaVSAvoidoptical system complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent introduces alignment marks as intermediary elements that mediate between the optical system and the large surface. These marks serve as reference points that simplify the positioning and alignment process, eliminating the need for complex optical expansion components while still enabling processing of large areas through systematic navigation using the marks.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If alignment marks are generated iteratively across multiple regions, then the positioning precision is maintained, but the processing time increases

Engineering Contradiction:
Improvepositioning precisionVSAvoidprocessing time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary generation of alignment marks in each region before actual pattern processing. This preliminary action establishes reference points that enable rapid and precise positioning throughout subsequent processing steps. By preparing the alignment infrastructure first, the system avoids time-consuming realignment operations during the main processing phase, thus reducing overall processing time while maintaining precision.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the efficient generation of micro-structured patterns on large surfaces by iteratively using alignment marks to maintain precise positioning, effectively overcoming the limitations of the optical system's field-of-view and enabling the production of complex patterns on aircraft and turbine components.

Implementation Method 1

optically generating at least one first alignment mark on a first region of a surface using a first optical processing system

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS20240367257A1Methods for large-scale optical manufacturing
Publication Date: 2024.11.07 NIKON CORP
  • US20240367257A1 patent drawing
  • US20240367257A1 patent drawing
  • US20240367257A1 patent drawing

AI summary

Systems and methods are disclosed that address the problem of large-scale optical manufacturing of microstructures. The systems and methods utilize one or more optical processing systems to generate a first set of alignment marks in a first region on a surface. The optical processing systems then move their focus to a second region on the surface. The second region generally partially overlaps the first region such that the optical processing systems can detect the location of the first set of alignment marks. The optical processing systems then generate a second set of alignment marks based on the location of the first set of alignment marks. This process is repeated in an iterative manner until alignment marks have been generated on all regions of the surface. The alignment marks can be used to optically align one or more optical processing systems configured to produce 3D structures on the surface.