Optical Alignment Device for Substrate Mark Precision
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Solution Overview
Problem
Existing substrate alignment devices face challenges in accurately aligning circuit patterns on semiconductor or liquid crystal display devices when the separation distance between aligners is greater than the distance between alignment marks, and when the distance between alignment marks changes, leading to interference and reduced alignment precision.
Innovation Solution
The alignment device employs an optical member with multiple reflective faces and movable optical elements, including prisms and mirrors, to diverge and transmit alignment beams between aligners, allowing for accurate measurement and alignment even when the distance between alignment marks is smaller than the distance between aligners, and enabling adjustment to changing distances between marks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the separation distance between aligners is greater than the distance between alignment marks, then the alignment device can accommodate larger workpiece sizes, but interference between aligners increases and alignment precision deteriorates
Solution Approach 1:
The optical path is segmented into separate channels for each aligner using beam splitters and mirrors. Each aligner has its own dedicated optical path that reflects off corresponding alignment marks, preventing cross-interference between adjacent aligners even when they are positioned far apart on the workpiece.
Solution Approach 2:
Beam splitters and mirrors serve as intermediary optical elements that redirect and separate the alignment beams. These intermediaries enable the alignment marks to be measured independently by multiple aligners simultaneously, resolving the interference problem while maintaining the ability to measure large workpieces.
2Adaptability or versatility
If the distance between alignment marks changes, then the device can accommodate varying workpiece configurations, but interference between aligners increases and alignment precision deteriorates
Solution Approach 1:
The optical measurement system is segmented into independent channels, where each aligner measures its corresponding alignment mark through a dedicated optical path. This segmentation ensures that changes in the distance between alignment marks do not create interference between different measurement channels, maintaining precision across varying workpiece configurations.
Solution Approach 2:
The optical path configuration is designed to be dynamically adaptable to different mark positions. The beam splitters and mirrors are arranged to automatically route beams to the correct aligners regardless of the specific distances between alignment marks, enabling the system to handle variable workpiece configurations without sacrificing precision.
3Measurement precision
If multiple aligners are positioned close together, then alignment precision can be maintained, but the device complexity increases
Solution Approach 1:
Multiple optical paths are merged into a single integrated optical system using shared beam splitters and mirrors. This merging approach allows multiple aligners to operate simultaneously with precise measurement capability while avoiding the need for completely separate optical systems for each aligner, thus managing device complexity.
Solution Approach 2:
The beam splitters and mirrors serve multiple functions: they redirect beams to different aligners, separate optical paths to prevent interference, and enable simultaneous measurement by multiple aligners. This multi-functionality reduces the total number of components needed, managing system complexity while maintaining precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures precise alignment of marks by reducing interference between aligners and allows for accurate alignment control, even when the distance between alignment marks changes, thereby enhancing the alignment precision and reliability of the substrate alignment process.
Implementation Method 1
an optical member to diverge alignment beams reflected from neighboring alignment marks of the plurality of alignment marks and to transmit the beams to neighboring aligners of the plurality of aligners respectively
Data Source
AI summary
An example embodiment relates to an alignment device including an optical aligner system including a plurality of aligners configured to measure a position of a workpiece having a plurality of alignment marks, and an optical member. The optical member is configured to diverge alignment beams reflected from neighboring alignment marks of the plurality of alignment marks and transmit the beams to neighboring aligners of the plurality of aligners respectively if a distance between the neighboring aligners is greater than a distance between the neighboring alignment marks.