Optical Amplifier Support Layout for Stable EUV Drive Laser Beams
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Solution Overview
Problem
Existing optical amplifiers in drive lasers for EUV lithography systems suffer from beam drift due to deformations and vibrations of the optics frame, which can lead to misalignment of the laser beam.
Innovation Solution
The optics frame is supported on a base frame via at least three supports arranged within its virtual centre plane, which includes the centre of gravity, allowing for reduced rotation and deformation, and optionally features a heat shielding element to minimize thermal influence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the optics frame is rigidly fixed to the base frame, then structural stability is improved, but beam drift increases due to transmitted vibrations and deformations
Solution Approach 1:
The patent introduces at least three supports as intermediary elements between the optics frame and base frame. These supports act as mediators that provide stable mounting while isolating the optics frame from vibrations and deformations of the base frame, thereby preventing beam drift without sacrificing structural stability.
2Manufacturing precision
If the optics frame is suspended from vibrating components, then beam drift is reduced, but structural stability deteriorates
Solution Approach 1:
The supports serve as intermediary elements that provide stable mounting while isolating the optics frame from vibrations and deformations of the base frame, thereby preventing beam drift without sacrificing structural stability.
3Adaptability or versatility
If supports are arranged outside the virtual centre plane, then mounting flexibility is improved, but rotation and deformation of the optics frame increase
Solution Approach 1:
By arranging the supports within the virtual centre plane of the optics frame, the patent creates an equipotential support configuration that minimizes rotational moments and deformations. This arrangement ensures that the supports are positioned where they can best stabilize the frame against rotation while maintaining adequate mounting flexibility.
Data Source
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AI summary
The present invention concerns an optical amplifier (2) for a drive laser (100) for use in a lithography system (101), in particular an extreme ultraviolet lithography system, with a base frame (400) and with an optics frame (200) to which optical cavities, and optionally beam guiding elements, are attached, wherein the optics frame (200) has a virtual centre plane (C) that is arranged essentially horizontally, wherein the optics frame (200) is supported on the base frame (400) via at least three supports (202, 203, 204) each that are arranged at a point within the virtual centre plane (C) of the optics frame (200). The present invention further concerns a lithography system (101), in particular extreme ultraviolet lithography system, comprising a drive laser (100) with an optical amplifier (200) as mentioned before.