Optical Antennas for Semiconductor Testing Resolution
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Solution Overview
Problem
Current optical techniques for testing semiconductor devices are limited by fundamental optical resolution, making it difficult to accurately test devices with reduced feature sizes, and additional test points are not feasible due to manufacturing complexity.
Innovation Solution
The use of optical antennas formed from metal segments on the same layers as signal interconnections, which act as radiators or receivers to convert between radiated and localized optical energy, enabling enhanced testing without increasing manufacturing complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional optical techniques are used for testing, then testing capability is maintained, but measurement precision deteriorates due to fundamental optical resolution limits at reduced feature sizes
Solution Approach 1:
The patent replaces traditional mechanical/optical focusing systems with optical antennas that directly convert optical energy to localized energy at test points. This substitution enables precise energy delivery at sub-wavelength scales, overcoming the diffraction limit of conventional optical techniques and achieving accurate testing at reduced feature sizes.
Solution Approach 2:
The patent changes the fundamental parameter of optical energy delivery by using resonant optical antennas tuned to specific frequencies. This allows concentration of optical energy at sub-wavelength dimensions through resonant enhancement, thereby achieving high measurement precision despite small feature sizes that would normally limit optical resolution.
2Measurement precision
If additional test points are added to improve testing coverage, then measurement precision improves, but device complexity increases due to manufacturing constraints
Solution Approach 1:
The patent makes existing metal interconnection layers serve dual functions: both signal transmission and optical antenna elements for testing. By designing these metal segments to function as optical antennas at specific frequencies, the system achieves enhanced testing coverage without adding separate test point structures, thereby avoiding increased device complexity and manufacturing burden.
Solution Approach 2:
The existing metal interconnection structures in the device serve their primary function while simultaneously providing optical antenna functionality for testing. This self-service approach eliminates the need for additional dedicated test structures, maintaining manufacturing simplicity while achieving comprehensive testing coverage through the multi-functional metal segments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for accurate testing of semiconductor devices by differentiating between minimally spaced devices, even at reduced-dimension processing nodes, and verifies correct manufacturing by comparing patterns of radiated optical energy, ensuring functional circuit elements operate according to predetermined criteria.
Implementation Method 1
The optical antennas convert between radiated optical energy to or from a test system and corresponding localized optical energy at the test locations
Data Source
AI summary
A device testing approach employs optical antennas at test locations of a semiconductor device, usable as either/both radiators or receivers. As a radiator, an antenna responds to localized optical energy at a test location of the device to generate corresponding radiated optical energy that can be sensed and processed by a test system. As a receiver, an antenna receives radiated optical energy as generated by a test system and converts the energy into corresponding localized optical energy for affecting operation of the device. The optical antennas may be formed from metal segments on the same metal layers used for signal interconnections in the device, and thus the disclosed approach can provide enhanced test functionality without burdening the device manufacturing process with additional complexity solely to support testing. The testing approach may be used in different modalities in which the antennas variably act as transmitters, receivers, and reflectors/refractors.