Optical Apparatus Phase Modulation Calibration
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Solution Overview
Problem
Conventional microscopes face challenges in accurately performing patterned irradiation due to errors in the optical system, leading to discrepancies between the designated pattern and the actual pattern formed on a sample.
Innovation Solution
An optical apparatus is developed that includes a laser light source, a phase-modulation spatial light modulator, a scan unit, a detector, and a controlling unit, which calibrates the phase modulation of the spatial light modulator based on the designated pattern and the actual irradiation pattern to correct for errors, ensuring precise pattern formation on the sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If patterned irradiation is performed using a phase-modulation spatial light modulator, then the ability to form patterns on a sample is improved, but the accuracy of pattern positioning and shape deviates from the designated pattern due to optical system errors
Solution Approach 1:
The patent applies preliminary action by performing calibration before actual patterned irradiation. The calibration process involves designating a calibration pattern, measuring the actual irradiation pattern with a detector, calculating correction parameters, and storing them for subsequent use. This preliminary calibration step ensures that future patterned irradiation achieves high accuracy by compensating for optical system errors in advance.
Solution Approach 2:
The patent implements feedback by using a detector to measure the actual irradiation pattern formed on the sample, comparing it with the designated calibration pattern, and calculating correction parameters based on the measured deviations. This feedback loop enables the system to automatically adjust and correct pattern positioning and shape errors, improving manufacturing precision through iterative optimization.
2Manufacturing precision
If calibration is performed to correct optical system errors, then pattern positioning accuracy is improved, but the device complexity increases due to additional calibration components and procedures
Solution Approach 1:
The patent applies universality by designing a calibration system that uses the same optical path and components as the actual patterned irradiation process. The phase-modulation spatial light modulator, detector, and control unit serve dual purposes: they are used both for calibration and for the main irradiation function. This multi-functionality reduces device complexity by avoiding separate dedicated calibration components.
Solution Approach 2:
The patent implements self-service by enabling the optical apparatus to perform its own calibration using built-in components. The system uses its own phase-modulation spatial light modulator to generate calibration patterns, its own detector to measure actual patterns, and its own control unit to calculate and store correction parameters. This self-calibration capability eliminates the need for external calibration equipment and simplifies the overall system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves accurate patterned irradiation by calculating and applying correction parameters, allowing for precise alignment and shape conformity of the irradiation pattern with the designated pattern, enhancing the calibration process and patterned irradiation accuracy.
Implementation Method 1
a phase-modulation spatial light modulator that is located at a position optically conjugate to a pupil position of the objective and that modulates a phase of the laser light
Implementation Method 2
an objective that irradiates a sample with laser light from the laser light source
Data Source
AI summary
An optical apparatus includes: laser; objective that irradiates a sample with laser light; phase-modulation spatial light modulator that is located at a pupil conjugate position of the objective and modulates a phase of the laser light; scan unit that scans the sample with the laser light; detector that detects observation light from the sample; image generating unit that generates a sample image according to a signal from the detector and control information of the scan unit; and controlling unit that sets for the modulator a modulation amount of the phase of laser light in accordance with a pattern to be formed on the sample using the laser light. According to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the modulator.