Optical Assembly Decoupling Actuator Heat

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Solution Overview

Problem

Existing optical systems face challenges in maintaining the stability and precision of optical elements due to heat generation and particle contamination from actuators and sensors, leading to imaging failures and reduced precision in adjustments.

Innovation Solution

The optical arrangement decouples manipulators and actuators from the optical elements using a decoupling means, separating heat-generating components and preventing particle penetration through effective sealing and insulation, while using contactless measuring and active or passive damping elements to maintain precise control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If actuators and sensors are positioned inside the housing to directly control optical elements, then control precision and responsiveness are improved, but heat generation and particle contamination affect optical element stability and imaging quality

Engineering Contradiction:
Improvecontrol precisionVSAvoidheat generation and particle contamination
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The system is divided into two separate spatial zones: a first housing containing manipulators and actuators, and a second housing containing optical elements. This segmentation isolates heat-generating and particle-generating components from sensitive optical components, resolving the contradiction between control precision and thermal/particle contamination.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A coupling device with a rod connects the manipulator in the first housing to the optical element in the second housing, serving as an intermediary transmission mechanism. This allows precise force transmission while maintaining spatial separation, enabling control precision without direct contact between harmful and sensitive components.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If manipulators are arranged outside the housing, then thermal influence on optical elements is reduced, but mechanical connection complexity increases and may introduce particles

Engineering Contradiction:
Improvethermal influenceVSAvoidmechanical connection complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The manipulator is extracted from the optical housing and positioned in a separate first housing. This extraction removes the source of heat and particles from the optical environment, reducing thermal influence while the coupling device manages the necessary mechanical connection.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The coupling device employs a rod that can be sealed and isolated, potentially using flexible sealing mechanisms to prevent particle contamination while transmitting mechanical force from the external manipulator to the internal optical element, reducing complexity compared to rigid sealed connections.

Inventive Principle:
Principle #30Flexible shells and thin films

3Ease of operation

If mechanical connecting elements are used to link manipulators and optical elements, then direct control is achieved, but particles may penetrate into the optical system

Engineering Contradiction:
Improvedirect controlVSAvoidparticle penetration
Core Design Contradiction:
Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The mechanical connection is segmented into two parts: the manipulator in the first housing and the optical element in the second housing, connected by a rod through a defined interface. This segmentation allows direct control while isolating particle generation zones from optical zones.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The rod acts as an intermediary mechanical element that transmits force from the manipulator to the optical element while being contained within a sealed coupling device, preventing particle penetration into the optical system while maintaining direct control capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Manufacturing precision

If energy-carrying actuators are positioned near optical elements for precise manipulation, then adjustment precision is improved, but local warming up causes optical elements to shift or deform

Engineering Contradiction:
Improveadjustment precisionVSAvoidlocal warming up
Core Design Contradiction:
Manufacturing precisionVSTemperature

Solution Approach 1:

The system segments the actuator and optical element into separate housings, physically distancing the heat-generating actuator from the temperature-sensitive optical element. This maintains adjustment precision through the coupling mechanism while preventing local warming up that would cause shifting or deformation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The coupling device with its rod serves as a thermal intermediary, transmitting mechanical force for precise adjustment while being designed to minimize thermal conduction from the actuator to the optical element, thus preventing warming-up-induced deformation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS7791826B2Optical assembly
Publication Date: 2010.09.07 CARL ZEISS SMT GMBH
  • US7791826B2 patent drawing
  • US7791826B2 patent drawing
  • US7791826B2 patent drawing

AI summary

An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator and the element to be influenced by the manipulator in the interior of the arrangement.