Adjustable Optical Attenuator for PMT Linear Range Control

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Solution Overview

Problem

Scanning electron microscopes face challenges in limiting the intensity of the electron beam to match the linear response range of photomultiplier tubes (PMTs) without reducing throughput, as PMTs have a limited linear response range and excessive light intensity can lead to instability and reduced sensitivity.

Innovation Solution

An adjustable attenuation optical unit is introduced, comprising a lightguide with an adjustable attenuator that can modify the area of the exterior surface to control light intensity, using materials like liquid crystal glass or smart glass to adjust transparency and block excess light, ensuring the light intensity reaching the PMT is within its linear response range.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If light intensity is reduced to match PMT linear response range, then PMT signal stability is improved, but SEM throughput is reduced

Engineering Contradiction:
ImprovePMT signal stabilityVSAvoidSEM throughput
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent employs a variable attenuator that can dynamically adjust its attenuation level based on the intensity of incident light. This dynamic adjustment allows the system to maintain PMT operation within its linear response range while compensating for variations in light intensity, thereby preserving both signal stability and maximizing throughput without unnecessary attenuation.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The variable attenuator changes the parameter of light transmission by adjusting its attenuation characteristics. By modifying the attenuation parameter in response to light intensity conditions, the system ensures that the PMT receives light within its linear range while minimizing the loss of signal, thus resolving the contradiction between stability and throughput.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If fixed attenuation is used to limit light intensity to PMT linear range, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
ImprovePMT measurement accuracyVSAvoidoptical unit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The variable attenuator is configured to automatically adjust its attenuation level based on the intensity of incident light without requiring external control mechanisms. This self-regulating capability maintains measurement precision by ensuring the PMT operates within its linear range while avoiding the complexity of additional control systems, sensors, or feedback circuits.

Inventive Principle:
Principle #25Self-service

3Adaptability or versatility

If variable attenuator is added to adjust light intensity dynamically, then adaptability is improved, but device complexity increases

Engineering Contradiction:
Improvelight intensity adjustment capabilityVSAvoidoptical unit complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The variable attenuator automatically adjusts its attenuation characteristics in response to variations in light intensity, providing adaptability without requiring external control systems. This self-regulating mechanism enables the optical unit to adapt to different light conditions while maintaining a relatively simple overall device architecture.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution stabilizes the signal output from the PMT, maintains high throughput, and reduces thermal and gain changes, providing consistent performance and improved detection efficiency by ensuring the light intensity is within the PMT's linear range, thus enhancing the overall operation of scanning electron microscopes.

Implementation Method 1

an adjustable attenuator that is configured to define an interfacing parameter related to an area of the exterior surface thereby receiving at least some of a light that impinges on the area

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Data Source

PatentUS11835769B2Adjustable attenuation optical unit
Publication Date: 2023.12.05 APPL MATERIALS ISRAEL LTD
  • US11835769B2 patent drawing
  • US11835769B2 patent drawing
  • US11835769B2 patent drawing

AI summary

An adjustable attenuation optical unit that may include a lightguide that includes a core, wherein the core comprises an output, an input and an exterior surface; and an adjustable attenuator that is configured to define an interfacing parameter related to an area of the exterior surface thereby receiving at least some of the light that impinges on the area.