Microfabricated Optical Beam Scanner with Integrated Waveguide and Facet
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Solution Overview
Problem
Current beam steering technologies for imaging devices, such as optical coherence tomography (OCT) systems, face challenges in miniaturization and precise alignment due to the use of bulky free-space optical elements, which limits the device's size reduction and increases alignment complexity.
Innovation Solution
The development of microfabricated optical beam scanners using substrates with patterned waveguides and facets, where the beam is reflected at an angle perpendicular to the surface, allowing for the integration of optical elements on the same substrate, enabling precise beam steering without the need for bulky free-space optics and facilitating batch fabrication for arrayed formats.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If free space optical elements are used for beam steering, then high quality performance is achieved, but device size becomes bulky and alignment precision requirements increase
Solution Approach 1:
The patent merges the waveguide, reflector, and optical element onto a single substrate, creating an integrated beam steering device. This consolidation eliminates the need for separate free-space optical components and their associated mounting structures, thereby reducing overall device volume while maintaining optical performance through precise fabrication-controlled alignments.
Solution Approach 2:
The patent replaces mechanical alignment systems (required for free-space optics) with a microfabricated structure where component positions are determined by semiconductor manufacturing processes. This substitution eliminates the need for manual mechanical alignment while achieving sub-micron positioning precision through controlled fabrication techniques.
2Reliability
If free space optical elements are used for beam steering, then high quality performance is achieved, but alignment precision requirements increase to 1 micron level
Solution Approach 1:
The patent replaces mechanical alignment systems (required for free-space optics) with a microfabricated structure where component positions are determined by semiconductor manufacturing processes. This substitution eliminates the need for manual mechanical alignment while achieving sub-micron positioning precision through controlled fabrication techniques.
Solution Approach 2:
The patent changes the alignment parameter control from post-fabrication mechanical adjustment to in-fabrication geometric control. By designing the waveguide, reflector, and optical element with predetermined geometric relationships that are maintained throughout the fabrication process, the system achieves precise alignment without requiring high-precision mechanical positioning operations.
3Ease of manufacture
If planar fabrication technologies are used for waveguides, then integrated device fabrication is enabled, but efficient collimating elements cannot be fabricated
Solution Approach 1:
The patent utilizes the third dimension (vertical depth) of the substrate to create three-dimensional optical paths and component arrangements. By etching waveguides and positioning optical elements at different depths and angles within the substrate, the design achieves efficient light collimation and steering using only planar fabrication techniques, without requiring complex lateral structures.
Solution Approach 2:
The patent employs composite material structures within the substrate, combining different materials with complementary optical properties. The substrate itself is engineered with specific refractive index profiles and optical characteristics that enable collimation functionality, allowing planar fabrication to produce high-performance optical elements that would otherwise require separate components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the creation of compact, high-performance beam scanning devices with improved alignment and reduced optical losses, allowing for efficient beam steering with a wide scanning angle, suitable for applications like OCT, while maintaining low cost and high uniformity through bulk fabrication techniques.
Implementation Method 1
a waveguide patterned over the first surface and configured to guide a beam of radiation along a length of the waveguide
Implementation Method 2
a facet located on the first surface and designed to reflect at least a portion of the beam of radiation at an angle that is substantially perpendicular to the first surface
Data Source
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AI summary
A scanning device is presented having a substrate with a first surface and an opposite, parallel second surface. A region of the substrate includes the first surface and the opposite parallel second surface, and is defined via an etching process through a thickness of the substrate, where the region remains attached to the substrate via one or more hinges. A waveguide is patterned over the first surface of the region and guides a beam of radiation along a length of the waveguide. The scanning device includes a facet located on the first surface of the region. The facet is designed to reflect at least a portion of the beam of radiation through the region. An optical element is located on the second surface of the region, and is designed to receive the reflected portion of the beam of radiation.