Optical Semiconductor Bonding Structure for Solder-Free Heat Dissipation

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Solution Overview

Problem

Bottom emission type semiconductor laser elements face issues with solder creep leading to short circuits and reduced laser light oscillation due to contamination and increased thermal resistance, affecting heat dissipation and output power.

Innovation Solution

The optical semiconductor device employs diffusion bonding between a mounting member and an optical semiconductor element using Au layers, eliminating the need for solder and positioning the light emitting part closer to the mounting member for enhanced heat dissipation, while forming an insulating film to control optical reflectivity and reduce thermal and electric resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If solder is used to bond the semiconductor laser element to the mounting member, then bonding is achieved, but the solder creeps up on the end face causing short circuits and contamination in the light emitting part

Engineering Contradiction:
Improveprevention of short circuit and contaminationVSAvoidsolder creep
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and eliminates the solder material from the bonding process. Instead of using solder to bond the semiconductor laser element to the mounting member, the invention uses a eutectic alloy layer formed by diffusion bonding between Au layers. This removes the harmful solder creep phenomenon entirely while maintaining effective bonding.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a eutectic alloy layer as an intermediary bonding interface between the semiconductor laser element and mounting member. This eutectic layer, formed through diffusion bonding of Au layers at controlled temperatures, serves as a mediator that provides reliable bonding without the harmful effects of traditional solder, preventing both short circuits and contamination.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If the light emitting part is positioned nearer to the bottom for better heat dissipation, then heat dissipation capability is improved, but the risk of solder contamination increases

Engineering Contradiction:
Improveheat dissipation capabilityVSAvoidsolder contamination
Core Design Contradiction:
TemperatureVSObject-affected harmful factors

Solution Approach 1:

The patent removes solder from the bonding process entirely, replacing it with a eutectic alloy bonding system. This elimination allows the light emitting part to be positioned closer to the mounting member for optimal heat dissipation without any risk of solder contamination, as the eutectic alloy does not exhibit harmful creep behavior.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If multiple bonding layers are used to prevent contamination, then reliability improves, but manufacturing complexity increases

Engineering Contradiction:
Improveprevention of contaminationVSAvoidbonding structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent employs composite material structure with multiple functional layers: Au layers on the semiconductor element and mounting member, a eutectic alloy layer formed through diffusion bonding, and an insulating film. This composite structure provides both contamination prevention and reliable bonding while maintaining manufacturing feasibility through a integrated diffusion bonding process.

Inventive Principle:
Principle #40Composite materials

4Object-generated harmful factors

If diffusion bonding is used instead of solder, then solder creep is eliminated, but bonding process complexity increases

Engineering Contradiction:
Improvesolder creepVSAvoidbonding process
Core Design Contradiction:
Object-generated harmful factorsVSEase of manufacture

Solution Approach 1:

The patent controls the bonding process by adjusting parameters including heating temperature (maintained at or above the eutectic point), heating time, and atmospheric conditions (inert gas or vacuum). These parameter controls enable diffusion bonding to proceed reliably without solder creep, achieving both elimination of harmful effects and manufacturing feasibility.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach prevents contamination, improves heat dissipation, reduces power consumption, and enhances the reliability and quality of the semiconductor device by minimizing thermal and electric resistance fluctuations, thus ensuring stable laser light oscillation and reduced manufacturing costs.

Implementation Method 1

heating under vacuum, the multiple sets of the mounting members and the optical semiconductor elements clamped using the jig, thereby to bond together the mounting member and the optical semiconductor element in each of the multiple sets, by diffusion bonding between the first bonding member or bonding layer and the second bonding member or bonding layer

Methodology Applied
Scientific EffectDiffusion bonding: Diffusion Welding

Data Source

PatentUS12155172B2Method for manufacturing optical semiconductor device
Publication Date: 2024.11.26 MITSUBISHI ELECTRIC CORP
  • US12155172B2 patent drawing
  • US12155172B2 patent drawing
  • US12155172B2 patent drawing

AI summary

Provided here are: a mounting member having a front surface on which a diffusion bonding layer is formed; an optical semiconductor element provided with a light emitting part therein, and having a rear surface on which a diffusion bonding layer is formed; and an electrode layer formed from the diffusion bonding layer and the diffusion bonding layer by diffusion bonding therebetween; wherein, in the optical semiconductor element, the light emitting part is provided near a side of the optical semiconductor element so as to be displaced toward the mounting member. This configuration not only makes unnecessary the use of a solder, an Ag paste and the like to thereby prevent the light emitting part in the optical semiconductor element from being contaminated by the solder, but also allows the light emitting part to be closer to the mounting member-side to thereby achieve improvement in heat-dissipation capability.