Optical Contact Bonding Robot with Laminar Gas Flow

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Solution Overview

Problem

The risk of inclusions or voids forming during optical contact bonding of components is high due to human intervention, which can weaken the connection and lead to rejection of component parts, especially in clean room environments where humans are a significant source of particles.

Innovation Solution

Implementing a method and apparatus where the placement and pressing of components are carried out by a robot to minimize the risk of particle deposition, using a laminar gas flow and controlled orientation of components to prevent particle settlement, and employing sensors to detect the correct abutment and initiate the bonding process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual handling and placement of components is used, then ease of operation is maintained, but the risk of particle contamination and formation of inclusions increases

Engineering Contradiction:
Improvebonding qualityVSAvoidautomation system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces manual mechanical handling with an automated robot system that uses suction cups for component pickup and placement. This substitution eliminates human intervention in the critical bonding area, preventing particle contamination while maintaining precise control over the placement process.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a ventilation device as an intermediary element that generates a laminar air flow between the components during bonding. This controlled air flow acts as a mediator to prevent particles from settling on the component surfaces, thereby reducing inclusion formation without requiring complete automation of the bonding process.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If horizontal orientation of components is used, then ease of operation is maintained, but particle settlement and inclusion formation increases

Engineering Contradiction:
Improvebonding qualityVSAvoidhandling difficulty
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent inverts the conventional horizontal orientation by implementing vertical placement of the first component onto the second component. This inversion changes the direction of gravity's effect on particles, preventing them from settling between the component surfaces during bonding, thereby reducing inclusion formation while maintaining operational simplicity through automated robot control.

Inventive Principle:
Principle #13The other way round (Inversion)

3Reliability

If automated robot placement is implemented, then particle contamination is reduced, but device complexity increases

Engineering Contradiction:
Improvebonding qualityVSAvoidautomation system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces manual mechanical handling with an automated robot system that uses suction cups for component pickup and placement. This substitution eliminates human intervention in the critical bonding area, preventing particle contamination while maintaining precise control over the placement process.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The robot system is designed with multi-functionality, combining component pickup, positioning, and placement capabilities in a single automated unit. This universal approach reduces the need for multiple separate devices and minimizes overall system complexity while achieving the goal of reduced particle contamination.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Reliability

If vertical orientation with laminar gas flow is used, then particle settlement is prevented, but device complexity and energy consumption increase

Engineering Contradiction:
Improvebonding qualityVSAvoidventilation device energy consumption
Core Design Contradiction:
ReliabilityVSUse of energy by stationary object

Solution Approach 1:

The patent introduces a ventilation device as an intermediary element that generates a laminar air flow between the components during bonding. This controlled air flow acts as a mediator to prevent particles from settling on the component surfaces, thereby reducing inclusion formation without requiring complete automation of the bonding process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The ventilation device operates periodically rather than continuously, activating only during the critical placement and bonding phases when particle prevention is most needed. This periodic operation reduces overall energy consumption while maintaining effective particle protection during the essential bonding process.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of robots significantly reduces the occurrence of inclusions or bubbles between the surfaces, ensuring a stronger and more reliable optical contact bonding process, with the ability to automate the process and maintain high cleanliness standards.

Implementation Method 1

Optical contact bonding is a connection of two materials in which the surfaces which bear against one another are held only by molecular forces of attraction

Methodology Applied
Scientific EffectMolecular forces of attraction: Van der Waals Force

Implementation Method 2

a laminar gas flow is generated between the first surface of the first component and the second surface of the second component with a ventilation device

Methodology Applied
Scientific EffectLaminar flow: Laminar Flow

Data Source

PatentUS20240036345A1Method and apparatus for the optical contact bonding of components
Publication Date: 2024.02.01 CARL ZEISS SMT GMBH
  • US20240036345A1 patent drawing
  • US20240036345A1 patent drawing
  • US20240036345A1 patent drawing

AI summary

A method for optical contact bonding components includes: placing a first surface (2a) of a first component (2) onto a second surface (3a) of a second component (3), to form an air film, and pressing the first surface against the second surface for optical contact bonding of the two components. Placing and pressing the first component is carried out by a robot (4). A laminar gas flow (10) is generated between the first and second surfaces with a ventilation device (9). A related apparatus (1) includes: the robot, configured to place the first surface onto the second surface thereby forming an air film. The robot presses the first surface against the second surface, to optically contact bond the first and second components. A holding device (8) holds the second component during the placing and pressing. A ventilation device generates the laminar gas flow between the first and second surfaces.